Monolithically Integrated <b>μ</b>LEDs/HEMTs Microdisplay on a Single Chip by a Direct Epitaxial Approach

Cai, Yuanjing; Zhu, Chenqi; Zhong, Wei; Feng, Peng; Jiang, Sheng; Wang, Tao

doi:10.1002/admt.202100214

Cited by 11 publications

(12 citation statements)

References 36 publications

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“…Based on the CSE approach, ultrasmall µLEDs with a record EQE in the green and red spectral regions have been achieved [98,99]. The CSE approach has also led to the demonstration of epitaxially integrating a microcavity and ultrasmall µLEDs achieving a very stable emission wavelength and the demonstration of monolithically integrating µLEDs with HEMTs for VLC and microdisplay applications [100][101][102][103].…”

Section: Advances In Science and Technology To Meet Challengesmentioning

confidence: 99%

“…Other compelling benefits using CC-micro-LEDs include an improved color purity and homogeneity that cannot be easily attained by semiconductor epitaxy. From the point of view of display system design, color-conversion approach requires only single-type of monochromatic micro-LED array that can be individually addressable by a much simpler driver circuit design [103,129,131].…”

Section: Statusmentioning

confidence: 99%

“…In light of the emergence of GaN-based HEMTs [163], researchers have explored the possibility of monolithically integrating GaN-based micro-LED and driving circuits on the same wafer, eliminating the need for mass transfer [131]. This approach has been demonstrated through an 8 × 8 monochrome microdisplay featuring micro-LED/HEMTs with a chip diameter of 20 µm, using a direct selective regrown method [103]. Furthermore, a vertically stacked micro-LED architecture has been developed for ultrasmall, full-color, and high-definition displays [112].…”

Section: Advances In Science and Technology To Meet Challengesmentioning

confidence: 99%

See 2 more Smart Citations

The micro-LED roadmap: status quo and prospects

Lin,

Wu,

Kuo

et al. 2023

J. Phys. Photonics

Self Cite

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Micro LED can play an important role in the future generation of smart displays. They are found very attractive in many applications, such as maskless lithography, biosensor, AR/MR etc., at the same time. A monitor that can fulfill saturated color rendering, high display resolution, and fast response time is highly desirable, and the micro LED-based technology could be our best chance to meet these requirements. At present, semiconductor-based RGB micro LED chips and color-conversion enhanced Micro LEDs are the major contenders for the full-color high resolution displays. Both of the methods need revolutionary ways to perfect the material qualities, fabricate the device, assemble the individual parts into a system. In this roadmap, we will highlight the current status and challenges of the micro LED-related issues, and discuss the possible advances in science and technology that can stand up to the challenges. The innovation in epitaxy, such as the tunnel junction, the direct epitaxy and nitride based quantum wells for red and ultraviolet, can provide critical solutions of the micro LED performance in various aspects. The quantum scale structure like nanowire or nanorod can be crucial for the scaling of the devices. Meanwhile, the color conversion method, which uses colloidal quantum dots as the active material, can provide a hassle-free way to assemble a large micro LED array, and emphasis on the full color demonstration via colloidal quantum dots. These quantum dots can be patterned by porous structure, inkjet or photo-sensitive resin. In addition to the micro LED devices, the peripheral components or technologies are equally important. Microchip transfer and repair, heterogeneous integration with the electronics and the novel 2D material cannot be ignored or the overall display module will be very power-consuming. The augmented reality is one of the potential customer for our micro-LED displays and the user experience so far is limited due to lack of the truly qualified display. Our analysis showed the micro LED is on the way to address and solve the current problems, such as high loss optical coupling and narrow field of view. All these efforts are channeled to achieve an efficient display with all ideal qualities that meet our most stringent viewing requirements and expect it to become an indispensable part of our daily life.

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Section: Advances In Science and Technology To Meet Challengesmentioning

confidence: 99%

Section: Statusmentioning

confidence: 99%

Section: Advances In Science and Technology To Meet Challengesmentioning

confidence: 99%

See 1 more Smart Citation

The micro-LED roadmap: status quo and prospects

Lin,

Wu,

Kuo

et al. 2023

J. Phys. Photonics

Self Cite

View full text Add to dashboard Cite

show abstract

“…In addition, the CSE approach has also been employed to monolithically integrate µLEDs with high electron mobility transistors (HEMTs) for visible light communication (VLC) and display applications. [38,39] 3. The CSE approach 3.1.…”

Section: Nature and Mechanism Of The Confined Selective Epitaxy Approachmentioning

confidence: 99%

Review of a direct epitaxial approach to achieving micro–LEDs

2023

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“…Among them, fully monolithic integration which aims to build both micro-LEDs and to drive thin-film transistors (TFTs) on the same substrate hold great promise with regard to future micro-displays. [49][50][51] However, the technology is currently in its infancy and thus cannot be directly adapted to consumer products. Compared to fully monolithic approaches, monolithic hybrid integration is more practical.…”

Section: Display Technology For Ar/vr Headsetsmentioning

confidence: 99%

Progress and Prospects of Nanoscale Emitter Technology for AR/VR Displays

Park

Keum

Zhou

et al. 2022

Adv Materials Technologies

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Augmented reality (AR) and virtual reality (VR) are emerging interactive technologies that realize the “metaverse,” leading to a totally new digital interactive experience in daily life in various aspects. In order to provide users with a more immersive experience, displays for AR/VR have rapidly evolved to achieve high resolutions and a large color gamut on small panels. Recently, nanoscale light emitters such as quantum dots (QDs) and metal halide perovskites (MHPs) with high photoluminescence quantum efficiency and color purity levels have garnered much attention as color conversion materials in AR/VR displays. However, the low material stability and the absence of a high‐resolution patterning process that does not impair the optical properties of nanoscale emitters act as obstacles preventing the realization of high‐resolution AR/VR displays. Here, the state‐of‐the‐art technologies constituting current AR/VR devices are reviewed from an industrial point of view and the recent progress in QD and MHP emitter technologies are discussed, including their basic structural properties, synthesis strategies to enhance the stability, advanced patterning technologies, down‐conversion and light‐emitting diode applications. Based on the review, the authors’ perspective on future research directions of nanoscale emitters for next‐generation AR/VR displays is presented.

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Monolithically Integrated μLEDs/HEMTs Microdisplay on a Single Chip by a Direct Epitaxial Approach

Cited by 11 publications

References 36 publications

The micro-LED roadmap: status quo and prospects

The micro-LED roadmap: status quo and prospects

Review of a direct epitaxial approach to achieving micro–LEDs

Progress and Prospects of Nanoscale Emitter Technology for AR/VR Displays

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