2019 14th European Microwave Integrated Circuits Conference (EuMIC) 2019
DOI: 10.23919/eumic.2019.8909558
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MOM Capacitance Characterization in G-Band using On-wafer 3D-TRL Calibration

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Cited by 4 publications
(7 citation statements)
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“…This can be easily explained by the degradation of the MOM capacitor quality factor at mm-wave frequencies. For instance, at 140 GHz, the measured quality factor of a MOM capacitor in this technology is around 10 [11]. Thus, it can be expected a quality factor around 20 at 70 GHz.…”
Section: B Resultsmentioning
confidence: 81%
“…This can be easily explained by the degradation of the MOM capacitor quality factor at mm-wave frequencies. For instance, at 140 GHz, the measured quality factor of a MOM capacitor in this technology is around 10 [11]. Thus, it can be expected a quality factor around 20 at 70 GHz.…”
Section: B Resultsmentioning
confidence: 81%
“…The main advantage of the proposed technique is that the parasitic capacitances extraction is performed at high frequency and over a wide frequency range. This is to meet the growing demand from designers 24–26 …”
Section: Proposed Extraction Methodsmentioning
confidence: 99%
“…Then, the values of the extrinsic resistances and inductances are extracted at high‐frequencies 13 . Though, the development of reliable techniques for accurately extracting extrinsic parameters, mainly parasitic capacitances, is still a challenge for circuit designers, especially in the millimeter wave range 22–26 …”
Section: Introductionmentioning
confidence: 99%
“…This means that the quality factor of the equivalent capacitance of an open‐ended stub is twice the quality factor of the transmission line that is used for the stub. Since the S‐CPS has, like the S‐CPW, a high quality factor, which can reach more than 30 depending on the used technology, the equivalent capacitance quality factor can reach more than 60, which is much higher than the quality factor obtained with MOM capacitances at mm‐wave frequencies [4, 5].…”
Section: Synthesis Of High Q‐factor Inductance and Capacitance With S...mentioning
confidence: 99%
“…In ref. [5], the measured Q‐factor of MOM capacitances realised in a BiCMOS 55‐nm technology goes from 14 at 60 GHz to less than 9 at G‐band (140–220 GHz). Thus, the more favourable BEOL (Back‐End‐Of‐Line) of BiCMOS technologies makes it possible to significantly improve the quality factor of inductors and capacitors, but this remains very limited.…”
Section: Introductionmentioning
confidence: 99%