“…4, the temperature-dependent mobilities of pristine MoS 2 FETs, and directly and remotely doped MoS 2 FETs increased as the temperature decreased because of suppressed phonon scattering ( 51 ). According to Matthiessen’s rule, the mobility of the channel can be written asμ4ppfalse(Tfalse)=(1μC Tα+1μphTβ)−1where T , μ c , μ ph , and α and β denote temperature, charged impurity scattering–limited mobility, and phonon-limited mobility at the zero-temperature limit, and their exponents, respectively ( 40 , 48 , 52 , 53 ). In this analysis, we assumed that the scattering sources, excluding charged impurity and phonon, such as intrinsic defects and the roughness of the substrate, were negligible because the charged impurity and phonon scattering are the most dominant mechanisms in the charge transport of MoS 2 , as demonstrated previously ( 48 , 51 ).…”