Modification of zirconium oxide film microstructure during post-deposition annealing

Ciosek, Jerzy; Paszkowicz, W.; Pankowski, P.; Firak, J.; Stanislawek, Urszula; Patron, Z.

doi:10.1016/s0042-207x(03)00111-8

Cited by 29 publications

(11 citation statements)

References 30 publications

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“…As can be seen, there is no evident diffraction peak, indicating that the as-deposited and annealed ZrO 2 films are all amorphous. This result is different from ZrO 2 films deposited at normal incidence [12]. The reason may be the shadowing effect and limited adatom diffusion [1], which inhibits the diffusivity of deposited atoms even in the postdeposition annealing process.…”

Section: Resultsmentioning

confidence: 88%

Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

Wang

et al. 2007

Thin Solid Films

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Section: Resultsmentioning

confidence: 88%

Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

Wang

et al. 2007

Thin Solid Films

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“…However, it has been reported in Ref. [42] that even pure ZrO 2 layers show changes of refractive index with varying layer thickness and the negative inhomogeneity effect has been observed at the initial stage until the thickness of ~ 70 nm. For comparison the Zr-Si-O layer on Bk7 glass was investigated.…”

Section: Results and Discusionmentioning

confidence: 92%

Optical methods for microstructure determination of doped samples

Ciosek¹

2008

16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics

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The optical methods to determine refractive index profile of layered materials are commonly used with spectroscopic ellipsometry or transmittance/reflectance spectrometry. Measurements of spectral reflection and transmission usually permit to characterize optical materials and determine their refractive index. However, it is possible to characterize of samples with dopants, impurities as well as defects using optical methods. Microstructures of a hydrogenated crystalline Si wafer and a layer of SiO 2 -ZrO 2 composition are investigated. The first sample is a Si (001):H Czochralski grown single crystalline wafer with 50 nm thick surface Si0 2 layer. Hydrogen dose implantation (D ≤ 4x10 l6 cm -2 ) results in a creation of porous (spongy) -like buried Si layer. Interaction between hydrogen atoms and a semiconductor, involving adsorption, surface diffusion, and desorption, continue to be an important issue in microelectronic device and sensor fabrication. Hydrogen-implanted silicon (Si: H) has become a topic of remarkable interest, mostly because of the potential of implantation-induced platelets and micro-cavities for the creation of gettering active areas and for Si layer splitting. Oxygen precipitation and atmospheric impurity are analysed. The second sample is the layer of co-evaporated SiO 2 and ZrO 2 materials using simultaneously two electron beam guns in reactive evaporation methods. The composition structure was investigated by X-Ray photoelectron spectroscopy (XPS), and spectroscopic ellipsometry methods. A non-uniformity and composition of layer are analysed using average density method.

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“…r.f. magnetron sputtering, 17 ion beam assisted deposition, 18 e-beam deposition, 19 plasma spraying, 20 pulsed laser deposition 21 and sol-gel 5,22,23 are used. Though the reports on sol-gel derived ZrO 2 thin films show porous nature, the effect of sol-age on the porosity and in turn on the surface and optical properties of films has not been studied in details.…”

Section: Introductionmentioning

confidence: 99%

Effect of sol-age on the surface and optical properties of sol-gel derived mesoporous zirconia thin films

Kumar

Reddy

2011

AIP Advances

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Modification of zirconium oxide film microstructure during post-deposition annealing

Cited by 29 publications

References 30 publications

Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

Preparation and characterization of nanostructured ZrO2 thin films by glancing angle deposition

Optical methods for microstructure determination of doped samples

Effect of sol-age on the surface and optical properties of sol-gel derived mesoporous zirconia thin films

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