Modeling and optimal design of piezoelectric cantilever microactuators

DeVoe, Don L.; Pisano, Albert P.

doi:10.1109/84.623116

Cited by 308 publications

(216 citation statements)

References 6 publications

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“…Microfabrication is an appealing route to increase device performance while avoiding cumbersome material development. In addition, the large strains and bending angles demonstrated by conjugated polymers are unmatched by the conventional actuator materials used in microsystems or MEMS devices, for example piezoelectrics [63] and shape memory alloys [64]. Therefore conjugated polymers are well suited to be employed as electro-active components in microsystems.…”

Section: Microactuatorsmentioning

confidence: 99%

Conjugated Polymers as Actuators for Medical Devices and Microsystems

Jager¹

2010

Iontronics

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Section: Microactuatorsmentioning

confidence: 99%

Conjugated Polymers as Actuators for Medical Devices and Microsystems

Jager¹

2010

Iontronics

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“…Composite material actuators' static behavior has been extensively studied [33][34][35]. However, none of these theories fits the proposed cMUTs design, because the vibrating diaphragm has a hexagonal appearance, and it contains at least four different layers.…”

Section: Structure Static Analysismentioning

confidence: 99%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

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“…4, the sensor beam is much wider and longer than the thickness. Therefore, the strain s y along the width of the beam can be assumed to be zero [7], [8]. For the PVDF sensing layer 9, with the above assumptions, based on the piezoelectric transverse effect, the unit piezoelectric equation is [9] …”

Section: B Pvdf Sensing Layer Modelmentioning

confidence: 99%

Closed-loop optimal control-enabled piezoelectric microforce sensors

Shen

Winder

et al. 2006

IEEE/ASME Trans. Mechatron.

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Abstract-This paper presents a closed-loop optimally controlled force-sensing technology with applications in both micromanipulation and microassembly. The microforce-sensing technology in this paper is based on a cantilevered composite beam structure with embedded piezoelectric polyvinylidene fluoride (PVDF) actuating and sensing layers. In this type of sensor, the application of an external load causes deformation within the PVDF sensing layer. This generates a signal that is fed through a linear quadratic regulator (LQR) optimal servoed controller to the PVDF actuating layer. This in turn generates a balancing force to counteract the externally applied load. As a result, a closed feedback loop is formed, which causes the tip of this highly sensitive sensor to remain in its equilibrium position, even in the presence of dynamically applied external loads. The sensor's stiffness is virtually improved as a result of the equilibrium position whenever the control loop is active, thereby enabling accurate motion control of the sensor tip for fine micromanipulation and microassembly. Furthermore, the applied force can be determined in real time through measurement of the balance force.

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Modeling and optimal design of piezoelectric cantilever microactuators

Cited by 308 publications

References 6 publications

Conjugated Polymers as Actuators for Medical Devices and Microsystems

Conjugated Polymers as Actuators for Medical Devices and Microsystems

Ultrasonic Transducers

Closed-loop optimal control-enabled piezoelectric microforce sensors

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