2007
DOI: 10.1016/j.surfcoat.2007.03.053
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MOCVD of magnesium titanium oxide thin films using an unusual magnesium precursor

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Cited by 8 publications
(7 citation statements)
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“…However, it is still possible to observe the formation of a second phase MgTi 2 O 5 at this given temperature. In the pure phase MTO powders are obtained at 700 • C and all of the diffraction peaks can be indexed as a rhombohedral ilmenite-type structure with space group R-3H (see Figure 2), which is in agreement with the respective Joint Committee on Powder Diffraction Standards (JCPDS) card 06-0494 and with the diffraction peaks previously reported in the literature [18][19][20]. Figure 2 shows a representation of the unit cells of the MTO rhombohedral ilmenite-type structure with space group R-3H.…”
Section: Resultssupporting
confidence: 87%
“…However, it is still possible to observe the formation of a second phase MgTi 2 O 5 at this given temperature. In the pure phase MTO powders are obtained at 700 • C and all of the diffraction peaks can be indexed as a rhombohedral ilmenite-type structure with space group R-3H (see Figure 2), which is in agreement with the respective Joint Committee on Powder Diffraction Standards (JCPDS) card 06-0494 and with the diffraction peaks previously reported in the literature [18][19][20]. Figure 2 shows a representation of the unit cells of the MTO rhombohedral ilmenite-type structure with space group R-3H.…”
Section: Resultssupporting
confidence: 87%
“…In these crystalline films, all diffraction peaks can be indexed to the rhombohedral structure, which is in agreement with the respective Joint Committee on Powder Diffraction Standards (JCPDS) card no. 06-0494 and with the diffraction peaks previously reported in the literature. , …”
Section: Resultssupporting
confidence: 76%
“…The PL emission was attributed to the structural order–disorder and/or distortions on the [TiO 6 ]–[TiO 6 ] complex clusters . Most of the studies on MTO have been limited to the bulk crystal form; very few studies on MTO thin films have been reported. …”
Section: Introductionmentioning
confidence: 99%
“…[45,48] These results are consistent with those reported in the literature by Surendran et al [3] who showed that the MgTiO 3 thin film deposited on a platinum-coated silicon substrate by the sol-gel method was degraded into Mg 2 TiO 4 and TiO 2 phases after annealing at 800 C for 1 h in air atmosphere. The Mg 2 TiO 4 structure has also been detected with magnesium titanium oxide thin films deposited on fused quartz by MOCVD after annealing at 800 C. [49] So, we can say that MgTiO 3 thin films are more thermally stable in our case because the MgTiO 3 phase is observed after CA done at 800 C and after MA performed at 1000 C. The MgTi 2 O 5 phase is then detected after MA performed at 1200 C for 5 min. In fact, a reaction between MgTiO 3 and TiO 2 can form a fully disordered MgTi 2 O 5 powder at high temperature as already reported in the study by Lennie et al [50] On the other hand, the annealing temperature of 1200 C may seem low compared to that reported in the literature, which is 1860 C, [50] but it is extrapolated and these results have been obtained using powder.…”
Section: Comparison Of Effects Induced By Conventional and Ma On Mgti...supporting
confidence: 58%
“…The Mg 2 TiO 4 structure has also been detected with magnesium titanium oxide thin films deposited on fused quartz by MOCVD after annealing at 800 °C. [ 49 ] So, we can say that MgTiO 3 thin films are more thermally stable in our case because the MgTiO 3 phase is observed after CA done at 800 °C and after MA performed at 1000 °C. The MgTi 2 O 5 phase is then detected after MA performed at 1200 °C for 5 min.…”
Section: Resultsmentioning
confidence: 69%