2013
DOI: 10.1016/j.surfcoat.2013.03.009
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Microstructure, residual stress, and fracture of sputtered TiN films

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Cited by 112 publications
(27 citation statements)
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“…Indeed, in working conditions similar to our experimental parameters, they found tensile residual stress values included between 0 and 200 MPa. Nevertheless, this level is lower than those found by some other authors for TiN films [1,13,14,15]. This difference may be partially explained by different coating conditions (pressure, temperature, bias, etc.…”
contrasting
confidence: 59%
“…Indeed, in working conditions similar to our experimental parameters, they found tensile residual stress values included between 0 and 200 MPa. Nevertheless, this level is lower than those found by some other authors for TiN films [1,13,14,15]. This difference may be partially explained by different coating conditions (pressure, temperature, bias, etc.…”
contrasting
confidence: 59%
“…However, it was soon realized that composite layered structures provide beneficial improvements in fracture toughness as well [222,[317][318][319]. Provided in Table 1b are reported fracture toughness data for hard ceramic coatings, which range from 0.7 to 12.4 MPa m 1/2 for TiN coatings [320,321]; and from 1.6 to 5.1 MPa m 1/2 for DLC [316,322]; with ZrN between 2.3 and 7.5 MPa m 1/2 [323,324]. TiN is perhaps the most studied, and therefore it is not surprising that its observed K IC range is broader than for any of the other PVD coatings.…”
Section: Fracture Toughnessmentioning
confidence: 99%
“…Metal carbides and nitrides present good resistance against corrosion, and very high cohesive strength and hardness, associated with their extremely high melting points. These properties associated with their chemical characteristics make them an alternative to noble metals in catalysis [1,2], and to metal oxides under harsh conditions [3,4]. Among non-oxide ceramics, titanium carbides (TiC) and titanium nitrides (TiN) have been specially considered a promise hard material with excellent properties such as high thermal and electrical conductivity and good wear resistance, so it has been regularly deposited on bulk iron based materials to improve the surface features.…”
Section: Introductionmentioning
confidence: 99%