2015
DOI: 10.1021/acs.iecr.5b02449
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Microstructure and Tribological Properties of FeNPs@a-C:H Films by Micromorphology Analysis and Fractal Geometry

Abstract: This paper analyses the three-dimensional (3-D) surface texture of amorphous hydrogenated carbon films with sputtered iron nanoparticles (Fe NPs @ a-C: H) deposited by RF-Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) method on the quartz substrates. The prepared Fe NPs @ a-C: H films were used as research materials. The synthesized samples were deposited at four different pressures of 2.5, 3, 3.35 and 3.5 N/m 2 in the acetylene gas atmosphere. The Fe and C content of the thin films was obtained from X-r… Show more

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Cited by 82 publications
(23 citation statements)
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References 40 publications
(76 reference statements)
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“…All experiments were done at room temperature on quartz substrate and RF plasma system was activated by acetylene gas. The details of method can be seen in our pervious paper [10]. Two electrodes and RF power create plasma.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…All experiments were done at room temperature on quartz substrate and RF plasma system was activated by acetylene gas. The details of method can be seen in our pervious paper [10]. Two electrodes and RF power create plasma.…”
Section: Methodsmentioning
confidence: 99%
“…Diamond like carbon (DLC) coating because of its special properties is one of the interesting subjects nowadays [7][8][9][10], while the first one was fabricated by Aisenberg and Chabot 50 years ago [11]. Some of the properties are low friction factor, high abrasion resistance, optical transparency, high hardness factor, heat stability, chemical neutral and biocompatibility [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…These methods demonstrated their applicability for studies of various structures, including: thin diamond films [20], Fe nanoparticles on foreign substrates [21], and even magnetic domains [22]. The statistical and fractal characteristics can be derived from the autocorrelation function R (see Fig.…”
Section: Characterization Of the Surface Texturementioning
confidence: 99%
“…An intensive development of technology causes continuous increase of a wide base of research methods such as: atomic force microscopy (AFM) [5,6], scanning electron microscopy (SEM) [7,8] and X-ray diffraction (XRD) [7][8][9][10][11][12][13][14][15]. Especially methods such as XRD or SEM are widely used for analysis of the oxide layers [4,7,11,[13][14][15].…”
Section: Introductionmentioning
confidence: 99%