Microplasmas, an emerging field of low-temperature plasma science and technology

Foest, Rüdiger; Schmidt, Martin; Becker, K.

doi:10.1016/j.ijms.2005.11.010

Cited by 266 publications

(190 citation statements)

References 95 publications

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“…Helium and argon metastables can be excluded since they are subject to very fast two-step destruction processes via excited dimers at high pressures [15]. During this process radiation in the VUV is emitted (e.g.…”

Section: Oes In the Uv And Vuvmentioning

confidence: 99%

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Gathen¹,

Schaper²,

Knake³

et al. 2008

J. Phys. D: Appl. Phys.

113

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Despite enormous potential for technological applications, fundamentals of stable non-equilibrium micro-plasmas at ambient pressure are still only partly understood. Micro-plasma jets are one sub-group of these plasma sources. For an understanding it is particularly important to analyse transport phenomena of energy and particles within and between the core and effluent of the discharge. The complexity of the problem requires the combination and correlation of various highly sophisticated diagnostics yielding different information with an extremely high temporal and spatial resolution. A specially designed rf microscale atmospheric pressure plasma jet (µ-APPJ) provides excellent access for optical diagnostics to the discharge volume and the effluent region. This allows detailed investigations of the discharge dynamics and energy transport mechanisms from the discharge to the effluent. Here we present examples for diagnostics applicable to different regions and combine the results. The diagnostics applied are optical emission spectroscopy (OES) in the visible and ultraviolet and two-photon absorption laser-induced fluorescence spectroscopy. By the latter spatially resolved absolutely calibrated density maps of atomic oxygen have been determined for the effluent. OES yields an insight into energy transport mechanisms from the core into the effluent. The first results of spatially and phase-resolved OES measurements of the discharge dynamics of the core are presented.

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Section: Oes In the Uv And Vuvmentioning

confidence: 99%

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Gathen¹,

Schaper²,

Knake³

et al. 2008

J. Phys. D: Appl. Phys.

113

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show abstract

“…Plasmas are highly excited gases, containing reactive species including ions, radicals, electrons, and radiation. 66 These reactive species may be used for surface etching or, alternatively, deposition of various surface layers. [67][68][69][70] While plasma chemistry can be very complex, due to the many different species present, there are significant practical advantages.…”

Section: Microplasmasmentioning

confidence: 99%

Surface patterning of bonded microfluidic channels

Priest

2010

Biomicrofluidics

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Microfluidic channels in which multiple chemical and biological processes can be integrated into a single chip have provided a suitable platform for high throughput screening, chemical synthesis, detection, and alike. These microchips generally exhibit a homogeneous surface chemistry, which limits their functionality. Localized surface modification of microchannels can be challenging due to the nonplanar geometries involved. However, chip bonding remains the main hurdle, with many methods involving thermal or plasma treatment that, in most cases, neutralizes the desired chemical functionality. Postbonding modification of microchannels is subject to many limitations, some of which have been recently overcome. Novel techniques include solution-based modification using laminar or capillary flow, while conventional techniques such as photolithography remain popular. Nonetheless, new methods, including localized microplasma treatment, are emerging as effective postbonding alternatives. This Review focuses on postbonding methods for surface patterning of microchannels.

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“…Details on the characteristics of microplasma sources, their designs, modes of operation and potential applications have been discussed in the following review articles [1,[5][6][7][8]. Non-thermal microplasmas are rich sources of reactive ions, metastables, radicals and photons, and are particularly useful for the surface treatment of heat-sensitive materials such as polymers without altering the beneficial bulk properties of the material such as structural integrity or flexibility [9,10].…”

Section: Introductionmentioning

confidence: 99%

Microplasma Array Patterning of Reactive Oxygen and Nitrogen Species onto Polystyrene

Szili

Dedrick

et al. 2017

Front. Phys.

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We investigate an approach for the patterning of reactive oxygen and nitrogen species (RONS) onto polystyrene using atmospheric-pressure microplasma arrays. The spectrally integrated and time-resolved optical emission from the array is characterized with respect to the applied voltage, applied-voltage frequency and pressure; and the array is used to achieve spatially resolved modification of polystyrene at three pressures: 500, 760, and 1000 Torr. As determined by time-of-flight secondary ion mass spectrometry (ToF-SIMS), regions over which surface modification occurs are clearly restricted to areas that are exposed to individual microplasma cavities. Analysis of the negative-ion ToF-SIMS mass spectra from the center of the modified microspots shows that the level of oxidation is dependent on the operating pressure, and closely correlated with the spatial distribution of the optical emission. The functional groups that are generated by the microplasma array on the polystyrene surface are shown to readily participate in an oxidative reaction in phosphate buffered saline solution (pH 7.4). Patterns of oxidized and chemically reactive functionalities could potentially be applied to the future development of biomaterial surfaces, where spatial control over biomolecule or cell function is needed.

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Microplasmas, an emerging field of low-temperature plasma science and technology

Cited by 266 publications

References 95 publications

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Spatially resolved diagnostics on a microscale atmospheric pressure plasma jet

Surface patterning of bonded microfluidic channels

Microplasma Array Patterning of Reactive Oxygen and Nitrogen Species onto Polystyrene

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