2003
DOI: 10.1109/jsen.2003.820343
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Microfabrication and characterization of teflon af-coated liquid core waveguide channels in silicon

Abstract: The fabrication and testing of Teflon AF-coated channels on silicon and bonding of the same to a similarly coated glass wafer are described. With water or aqueous solutions in such channels, the channels exhibit much better light conduction ability than similar uncoated channels. Although the loss is greater than extruded Teflon AF tubes, light throughput is far superior to channels described in the literature consisting of [110] planes in silicon with 45 sidewalls. Absorbance noise levels under actual flow co… Show more

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Cited by 98 publications
(63 citation statements)
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“…A channel using a coating of Teflon AF and relying on total internal reflection is only limited by the absorption of the water core. It is likely that Teflon AF coated microchannels can be created in microchip cytometers as the methodology to coat microchannels etched in silicon with Teflon AF has previously been developed (18).…”
Section: Discussionmentioning
confidence: 99%
“…A channel using a coating of Teflon AF and relying on total internal reflection is only limited by the absorption of the water core. It is likely that Teflon AF coated microchannels can be created in microchip cytometers as the methodology to coat microchannels etched in silicon with Teflon AF has previously been developed (18).…”
Section: Discussionmentioning
confidence: 99%
“…Liquid core fibers consisting of either Teflon AF tubes or glass capillaries coated internally with Teflon AF have been applied in sensing since 1990s [6]. More recently the integration silicon, glass or PDMS substrates of these waveguides has been also demonstrated [7][8]. However, the use of Teflon AF is not easy and poses strong limitations.…”
Section: Optofluidic Waveguidesmentioning
confidence: 99%
“…Teflon ® AF coating to create integrated TIR-based waveguides on silicon (Datta et al 2003) -see Fig. 4b.…”
Section: Teflon Coated Microchannels In Silicon-wafer Bonding Was Commentioning
confidence: 99%