Micro-Spectrometer-Based Interferometric Spectroscopy and Environmental Sensing with Zinc Oxide Thin Film
Ciao-Ming Tsai,
Yu-Chen Hsu,
Chang-Ting Yang
et al.
Abstract:This study introduces a novel approach for analyzing thin film interference spectra by employing a micro-spectrometer equipped with a spectral chip. Focusing on zinc oxide (ZnO) thin films prepared via the sol–gel method, this research aims to explore the films’ physical properties through spectral analysis. After obtaining the interference spectrum of the ZnO thin films, the peak positions within the spectrum were cataloged. Mathematical simulation was used to adjust the refractive index and thickness of the … Show more
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