Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser

Liu, Jie; Yuan, Lei; Lei, Jincheng; Zhu, Wenge; Cheng, Baokai; Zhang, Qi; Yang, Song; Chen, Chuan; Xiao, Hai

doi:10.1364/ol.42.002459

Cited by 44 publications

(18 citation statements)

References 26 publications

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“…Thus, using the Rayleigh-Ritz method and according to equations (1)(2)(3)(4)(5)(6)(7)(8), the resonance frequency of microbeam after absorbing the nanoparticle can be expressed as:…”

Section: Dynamic Modeling Of Microbeams As Mass Sensorsmentioning

confidence: 99%

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Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

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“…Thus, using the Rayleigh-Ritz method and according to equations (1)(2)(3)(4)(5)(6)(7)(8), the resonance frequency of microbeam after absorbing the nanoparticle can be expressed as:…”

Section: Dynamic Modeling Of Microbeams As Mass Sensorsmentioning

confidence: 99%

“…Microbeam structures are extensively used in various sensors and actuators in electromagnetics, optics, and biology [1][2][3]. An important application of microbeams is in mass nanosensors.…”

Section: Introductionmentioning

confidence: 99%

Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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“…The sensitivity of the diaphragm in the FP acoustic sensor is defined as the ratio of the length variation of the FP cavity to the acoustic pressure. So various kinds of diaphragm materials have been studied for FPI acoustic sensors, such as silicon [3], silica [4], chitosan [5], silk fibroin [6], UV adhesive [7], silver [8], graphene [9], The associate editor coordinating the review of this manuscript and approving it for publication was Sukhdev Roy.…”

Section: Introductionmentioning

confidence: 99%

Study on the Sensitization Effect of Flywheel-Like Diaphragm on Fiber-Optic Fabry-Perot Acoustic Sensor

Wang

Jiang

et al. 2020

IEEE Access

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A flywheel-like sensitive diaphragm, which breaks the sensitivity limitations imposed by the increased thickness and the decreased radius in edge-clamped circular structure, has been proposed and analyzed in fiber Fabry-Perot (FP) acoustic sensor. A new model is built around the effect of diaphragm's structure parameters on sensitivity of a fiber FP acoustic sensor with common ductile material. The proposed sensor based on flywheel-like stainless diaphragm in 5mm diameter and 0.035mm thickness has been fabricated and its acoustic performances were tested. The test results show that our acoustic sensor can realize acoustic measurement from 0.1 kHz to 19 kHz. The sensor exhibits an acoustic pressure sensitivity of 1.525nm/Pa at the frequency of 4.5 kHz. The noise-limited minimum detectable pressure (MDP) level of ∼13.06µPa/ √ Hz@4.5kHz and the acoustic pressure signal-to-noise ratio (SNR) of 70.42dB@4.5kHz are achieved, respectively. And the mean SNR of cavity length variation of 62.43dB can be acquired over the entire frequency range. Comparing with the edge-clamped circular structure, the flywheel-like structure endows the common ductile sheet material the ability to response to acoustic pressure. Cost-effective and compact size give the proposed acoustic sensor a competitive edge, something of crucial importance to commercial applications.

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“…Phase/Wavelength-modulated fiber optic temperature sensors are more stable, easy to fabricate and interrogate [5,6,8]. Compared with the phase/wavelength-based temperature sensors, intensity-based fiber-optic sensors often have limitations due to their sensitivity to environmental changes such as the bending of optical fiber induced intensity change and source power vibrations [12]. Typically, a reflection mode probe-type configuration is preferred for temperature sensing with the advantage of easy installation during applications, enhanced robustness and improved signal stability.…”

mentioning

confidence: 99%

“…Typically, a reflection mode probe-type configuration is preferred for temperature sensing with the advantage of easy installation during applications, enhanced robustness and improved signal stability. Among the many demonstrated reflection-mode based probes, the interferometer and grating based structures are among the most popular choices for temperature sensing and have been successfully developed and proven to be capable of operating in extreme conditions [5,8,12,13].…”

mentioning

confidence: 99%

Information integrated glass module fabricated by integrated additive and subtractive manufacturing

et al. 2020

Self Cite

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In this letter, we report a novel integrated additive and subtractive manufacturing (IASM) method to fabricate information integrated glass module. After a certain number of glass layers are 3D printed and sintered by direct CO 2 laser irradiation, a microchannel will be fabricated on top of the printed glass by integrated picosecond laser, for intrinsic Fabry-Perot interferometer (IFPI) optical fiber sensor embedment. Then glass 3D printing process continues for the realization of bonding between optical fiber and printed glass. Temperature sensing up to 1000°C was demonstrated using the fabricated information integrated module. In addition, the long-term stability of the glass module at 1000°C was conducted. Enhanced sensor structure robustness and harsh temperature sensing capability makes this glass module attractive for harsh environment structural health monitoring.

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Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser

Cited by 44 publications

References 26 publications

Effect of microbeam geometry on the nano-mass sensor performance

Effect of microbeam geometry on the nano-mass sensor performance

Study on the Sensitization Effect of Flywheel-Like Diaphragm on Fiber-Optic Fabry-Perot Acoustic Sensor

Information integrated glass module fabricated by integrated additive and subtractive manufacturing

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