Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication

Halbwax, Mathieu; Sarnet, T.; Delaporte, Ph.; Sentís, M.; Etienne, H.; Torregrosa, Frank; Vervisch, V.; Perichaud, I.; Martinuzzi, S.

doi:10.1016/j.tsf.2007.12.117

Cited by 194 publications

(100 citation statements)

References 8 publications

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“…Different methods for fabricating b-Si have been introduced, such as laser texturization 20 , plasma immersion ion implantation 14 or metal-assisted wet etching 21 . Here, we use cryogenic deep reactive ion etching (DRIE) as it has multiple advantages: it is fast and inexpensive, there is no dependence on crystalline orientation, and there is no requirement for mask layers 22 .…”

Section: Reflectance and Surface Recombinationmentioning

confidence: 99%

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

et al. 2015

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The nanostructuring of silicon surfaces—known as black silicon—is a promising approach to eliminate front-surface reflection in photovoltaic devices without the need for a conventional antireflection coating. This might lead to both an increase in efficiency and a reduction in the manufacturing costs of solar cells. However, all previous attempts to integrate black silicon into solar cells have resulted in cell efficiencies well below 20% due to the increased charge carrier recombination at the nanostructured surface. Here, we show that a conformal alumina film can solve the issue of surface recombination in black silicon solar cells by providing excellent chemical and electrical passivation. We demonstrate that efficiencies above 22% can be reached, even in thick interdigitated back-contacted cells, where carrier transport is very\ud sensitive to front surface passivation. This means that the surface recombination issue has truly been solved and black silicon solar cells have real potential for industrial production. Furthermore, we show that the use of black silicon can result in a 3% increase in daily energy production when compared with a reference cell with the same efficiency, due to its better angular acceptance.Peer ReviewedPostprint (author's final draft

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Section: Reflectance and Surface Recombinationmentioning

confidence: 99%

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

et al. 2015

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“…applications. Perhaps the most well-known application of such a functionalized surface is the production of black silicon, which exhibits wide-band optical absorption for increased solar cell efficiency [1][2][3][4][5][6][7][8][9][10]. Additionally, the modification of wettability from superhydrophilic [11,12] to superhydrophobic [13][14][15][16] is utilized for self-cleaning surfaces, drag reduction, and anticorrosive surfaces, among others.…”

Section: Introductionmentioning

confidence: 99%

Formation of multiscale surface structures on nickel via above surface growth and below surface growth mechanisms using femtosecond laser pulses

2013

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"Formation of multiscale surface structures on nickel via above surface growth and below surface growth mechanisms using femtosecond laser pulses" (2013 Abstract:The formation of self-organized micro-and nano-structured surfaces on nickel via both above surface growth (ASG) and below surface growth (BSG) mechanisms using femtosecond laser pulse illumination is reported. Detailed stepped growth experiments demonstrate that conical mound-shaped surface structure development is characterized by a balance of growth mechanisms including scattering from surface structures and geometric effects causing preferential ablation of the valleys, flow of the surface melt, and redeposition of ablated material; all of which are influenced by the laser fluence and the number of laser shots on the sample. BSG-mound formation is dominated by scattering, while ASG-mound formation is dominated by material flow and redeposition. This is the first demonstration to our knowledge of the use of femtosecond laser pulses to fabricate metallic surface structures that rise above the original surface. These results are useful in understanding the details of multi-pulse femtosecond laser interaction with metals.

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“…Halbwax et al [72] produced slightly different geometries of such micro structures on ntype silicon doped phosphorus. This was done by varying processing parameters in vacuum.…”

Section: Topographic Surface Modificationsmentioning

confidence: 99%

Ultrashort Laser Pulses Machining

Samad¹,

Machado²,

Vieira³

et al. 2012

Laser Pulses - Theory, Technology, and Applications

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Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication

Cited by 194 publications

References 8 publications

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

Formation of multiscale surface structures on nickel via above surface growth and below surface growth mechanisms using femtosecond laser pulses

Ultrashort Laser Pulses Machining

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