Insolubilization mechanisms of chemically amplified resist systems using the pinacol rearrangement reaction have been investigated. An acid catalyzed dehydration of hydrobenzoin (HB) in a phenolic resin matrix proceeds by a consecutive reaction. HB converts to diphenylacetaldehyde (DAA), and subsequently the DAA produced reacts with HB to form 2,2‐diphenylmethyl‐4,5‐diphenyl‐1,3‐dioxolane (DPMDO), which is the dominant dissolution inhibitor of the HB resist. Benzopinacol (BP) and 1,1,2,2‐tetramethyle…
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