Mechanism for the Hard—X-Ray Emission in Vacuum Spark Discharges

Fukai, J.; Clothiaux, E. J.

doi:10.1103/physrevlett.34.863

Cited by 33 publications

(11 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[1][2][3][4][5][6][7] In previous experiments, x rays with energies up to 4 MeV were emitted in bursts from C and Al wires driven by a 1 MA current with a rise time of 150 ns. 6,7 These x-ray energies were much higher than the applied anode-cathode voltage of 1.5-2 MeV.…”

Section: Introductionmentioning

confidence: 99%

Energetic electron beam generation and anisotropy of hard x-ray emission from 0.9 to 1.0 MA high-Z X pinches

et al. 2003

View full text Add to dashboard Cite

An analysis of the energy, spatial character, and temporal evolution of electron beams and hard x rays from 0.9 to 1.0 MA high-Z X pinches is presented. Experimental results from Ti, Fe, Mo, and W X pinches show that X pinches are an effective source of hard x rays with energies greater than 30 keV. Electron beams with energies up to 2 MeV higher than the applied anode-cathode voltage are generated along the pinch axis before the maximum current is reached. The beams have diameters of about 3 mm and generate bursts of hard x rays with sizes between 1 and 2 mm and total time durations of up to 150 ns. The measured 100-500 keV x-ray distribution is spectrally anisotropic. Hard x-ray synchrotron radiation in the side-on direction is proposed as a possible explanation of this anisotropy.

show abstract

Section: Introductionmentioning

confidence: 99%

Energetic electron beam generation and anisotropy of hard x-ray emission from 0.9 to 1.0 MA high-Z X pinches

et al. 2003

View full text Add to dashboard Cite

show abstract

“…Typically, the x-ray spectrum below hv-150 keV is emitted from a plasma with electron temperature T,-10 keV. For the relatively few photons with hv)150 keV the spectrum decreases with photon energy according to a power law (Cilliers 1975;Fukai 1975). Typically, the x-ray spectrum below hv-150 keV is emitted from a plasma with electron temperature T,-10 keV. For the relatively few photons with hv)150 keV the spectrum decreases with photon energy according to a power law (Cilliers 1975;Fukai 1975).…”

Section: Introductionmentioning

confidence: 99%

Plasma points and radiative collapse in vacuum sparks

Koshelev

Pereira²

1991

Journal of Applied Physics

144

View full text Add to dashboard Cite

This review discusses the intense x-ray emitting regions, called plasma points, that appear in low-inductance vacuum sparks and other high-current discharges. Accurate x-ray spectroscopy indicates the existence of two types of plasma points with different plasma parameters. One type is extremely small ( -microns), dense ( -1023/cm3), and hot ( 2 1 keV), while the second type is an order of magnitude less extreme. A dynamic model (Vikhrev 1982a) based on radiation cooling with axial outflow of plasma predicts a radiative collapse that is consistent with many features of the plasma points. R21

show abstract

“…Because the magnetic field is inversely proportional to the plasma diameter, the increased magnetic force will accelerates the pinching process, i.e. a sausage instability in the pinch 10 Because the plasma has certain expansion speed, while the magnetic force tries to compress it, then a new pressure balance for the expansion and reduction will soon form. This balance is a transit period and then the plasma expands.…”

Section: Results Analysismentioning

confidence: 97%

<title>Vacuum spark for soft x-rays and the spherical pinch for EUV as point sources for microlithography</title>

Wu¹,

Tang²,

Wirpszo³

et al. 2000

SPIE Proceedings

View full text Add to dashboard Cite

The VSX is essentially a miniature discharge capable of emitting soft X-ray radiation. Because the radiation is emitted in small dose in each spark, it is necessary to repeat the phenomenon at high frequency in order to achieve the industrial throughput requirement. Relying on a X-ray collimator (either nested cones or capillary), the point radiation source can deliver a high quality beam suitable for microlithography. Current study shows that the X-ray energy per pulse can be I 13 I_U or higher with a pulse width (FWHM) of less than 50 ns. A 30 kHz operation in burst mode has been realized. The optimum conditions of the VSX operation have been carefully studied and are reported here. The lifetime can be as high as tens of hours in the low frequency operation or 100 million shots and this figure can be greatly improved. Pinhole camera images show that the source size is less than 1 mm. The throughput ofexposing 1 field per hour or more is readily achievable with current parameters and can be greatly improved with the higher operating frequency.The Spherical Pinch is a modified 0-pinch with high efficiency in the EUV region of spectrum. Working with different gases, the SPX machine (up to 33 kJ input energy) is optimized for EUV emission and can be fitted in an advanced EUV lithography system. The point source requirements are indeed met by the SPX for such system.

show abstract

Mechanism for the Hard—X-Ray Emission in Vacuum Spark Discharges

Cited by 33 publications

References 4 publications

Energetic electron beam generation and anisotropy of hard x-ray emission from 0.9 to 1.0 MA high-Z X pinches

Energetic electron beam generation and anisotropy of hard x-ray emission from 0.9 to 1.0 MA high-Z X pinches

Plasma points and radiative collapse in vacuum sparks

<title>Vacuum spark for soft x-rays and the spherical pinch for EUV as point sources for microlithography</title>

Contact Info

Product

Resources

About