Mechanical properties and fracture toughness of organo-silicate glass (OSG) low-k dielectric thin films for microelectronic applications

Vella, Joseph; Adhihetty, I.S.; Junker, K.; Volinsky, Alex A.

doi:10.1023/a:1024944316369

Cited by 78 publications

(48 citation statements)

References 32 publications

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“…The curvature was measured along two orthogonal directions over the central area. Then, the average stress was calculated from a modified version of Stoney's equation 19,20 using elastic modulus E = 73 ± 1 GPa and Poisson's ratio ν = 0.23 for the glass substrate. 21 The samples were deformed by a Berkovich diamond pyramid using a NanoHardness Tester machine from CSEM (Switzerland).…”

Section: Mechanical Characterizationmentioning

confidence: 99%

Elaboration and mechanical characterization of nanocomposites thin films

Mammeri

Bourhis

Rozes

et al. 2006

Journal of the European Ceramic Society

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Section: Mechanical Characterizationmentioning

confidence: 99%

Elaboration and mechanical characterization of nanocomposites thin films

Mammeri

Bourhis

Rozes

et al. 2006

Journal of the European Ceramic Society

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“…Other popular quantitative adhesion tests are the four-point bend [7], and the superlayer indentation tests [8]. In addition to measuring interfacial fracture toughness, indentation methods are also capable of assessing thin film and coating toughness [9,10].…”

Section: T E S C C C Thermalmentioning

confidence: 99%

Mechanical Aspects of Anti-Corrosive Coatings Performance Tests

Volinsky

2006

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Protective coating corrosion failure is a complicated process that involves various phenomena which are hard to test for separately. An adequately protected pipe can be in service for a relatively long time without exhibiting any signs of corrosion failure, and then all of a sudden it corrodes over a short period of time. Failure will definitely happen if the interface between the pipe surface and its protective coating system is somehow compromised or exposed to the environment. While corrosion reactions have quite a bit of variability in terms of time, the situation is further complicated when corrosion is coupled with the protective coating mechanical failure. Similar to materials fracture, corrosion failures are governed by the laws of probability, where multiple variables control the ultimate outcome.The coating system needs to be adequately tested before placing it in service, so there is a strong need for a meaningful corrosion test. A typical test would incorporate exposing scratched coating surface to certain corrosive environments for a fixed amount of time, trying to simulate the real conditions as close as possible. Sometimes, a so-called "freeze" step is introduced to "stress" the coating prior to exposing it to the test environment, ultimately causing its failure. Due to the differences in thickness, elastic, thermal and adhesion properties, various coatings would exhibit different results when exposed to a fixed freeze temperature. One needs to understand the mechanics of the freeze in order to properly utilize it. This paper considers the coating delamination and fracture mechanics, including the freeze step mechanics in terms of the strain energy release rate, and coating sub-critical debonding. This research is sponsored by the NACE University Research Seed Grant.

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“…Gerberich et al (2002) studied fracture defects on single crystal W(100) by means of the length scale surface to volume approach. Single phase and rather smooth organo-silicate glass low-K materials were investigated by Vella et al (2003) where a qualitative fracture toughness evaluation method based on critical strain/stress energy release rate was explored and illustrated by the AFM/SPM and SEM cross section images of fractured interfaces. A few nanometer thick organic smooth low-K films deposited on a silicon substrate were investigated by Nay et al (2004) using the nanoindentation technique at low sub mN loads.…”

Section: Introductionmentioning

confidence: 99%

Phenomenological nanoindentation technique in quality control of optoelectronics devices

Daugela

Gitis²,

Gelfeindbein³

2008

Microsyst Technol

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Multiphase and porous ceramic materials are being used as passive semiconductors for building modern optoelectronics devices. Prescreening of the critical parts for subsurface defects before assembly can prevent device failures in the field. A new nanoindentation based nondestructive method has been proposed where shapes of loading-unloading curves can fingerprint subsurface cracking and material porosity induced inelastic behavior in defected multiphase, rough and porous ceramic parts. In addition to the differences in nanoindentation loadingunloading curve shapes, nanohardness values associated with the cracked contact surfaces were 40% lower. The non-destructive nanoindentation results agree well with the destructive Knoop's microhardness results. A commercially available nanoindentation instrument integrated into the tribometer together with high-resolution optical microscope was utilized for automated and qualitative/ quantitative surface materials properties characterization of optoelectronics parts. The proposed instrument and nondestructive testing method can be used for quality control of optoelectronics parts before assembly, significantly improving the yields.

show abstract

Mechanical properties and fracture toughness of organo-silicate glass (OSG) low-k dielectric thin films for microelectronic applications

Cited by 78 publications

References 32 publications

Elaboration and mechanical characterization of nanocomposites thin films

Elaboration and mechanical characterization of nanocomposites thin films

Mechanical Aspects of Anti-Corrosive Coatings Performance Tests

Phenomenological nanoindentation technique in quality control of optoelectronics devices

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