Measuring Quality Factor From a Nonlinear Frequency Response With Jump Discontinuities

Davis, Wyatt O.

doi:10.1109/jmems.2011.2159103

Cited by 40 publications

(16 citation statements)

References 20 publications

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“…The fitted curves highlights a very good agreement between the model and experimental results. Compared to [6,7], Fig. 3 confirms that the fitting procedure requires very few experimental measurements around the maximal amplitude.…”

Section: A Experimental Setupmentioning

confidence: 59%

“…A recent study has demonstrated Q-factor estimation from a nonlinear frequency response [6], via precise measurements at low amplitudes (hence at low SNR) and the knowledge of the maximal amplitude on the frequency response, both of them difficult to measure in practice. Another study has demonstrated the efficiency of nonlinear least-squares fitting for parameter estimation of piezoelectric MEMS resonators from a nonlinear frequency response with jump discontinuities obtained through optical measurements [7].…”

Section: Introductionmentioning

confidence: 99%

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Parameter estimation from nonlinear frequency response of MEMS resonators

Brenes¹,

Jerome

Bourgois

et al. 2015

2015 IEEE International Symposium on Circuits and Systems (ISCAS)

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International audienceThis paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonato

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Section: A Experimental Setupmentioning

confidence: 59%

Section: Introductionmentioning

confidence: 99%

Parameter estimation from nonlinear frequency response of MEMS resonators

Brenes¹,

Jerome

Bourgois

et al. 2015

2015 IEEE International Symposium on Circuits and Systems (ISCAS)

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“…where From the results in [96], if the forcing function F 0 is sinusoidal at the resonant frequency ω n , we can arrive at an estimate for the amplitude at resonance…”

Section: B12 Static Responsementioning

confidence: 99%

High Performance Piezoelectric Actuators and Wings for Nano Air Vehicles

Rahn¹,

Tadigadapa²

2012

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“…Recently, several works have focused on the characterization of MEMS resonators through their nonlinear (large-displacement) frequency response [17]- [20]. For SDOF systems, some of these studies have even achieved nonlinear characterization via least-squares fitting procedures [19], [20].…”

Section: Introductionmentioning

confidence: 99%

Influence of the Driving Waveform on the Open-Loop Frequency Response of MEMS Resonators With Nonlinear Actuation Schemes

Brenes

Jerome

Bourgois

et al. 2016

J. Microelectromech. Syst.

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This paper deals with the influence of the shape of the driving waveform on the frequency responses of microelectromechanical systems (MEMS) resonators under nonlinear actuation. Our models show that, at large oscillation amplitudes, these responses are strongly dependent on the shape of the actuation waveform so that the nonlinear frequency response is not the system signature, but the system signature under a specific driving waveform. The case of a MEMS resonator electrostatically driven with a sine-, pulsed-, or square-wave voltage is specifically addressed. Our models and simulations, supported by experimental evidence, predict counterintuitive phenomena resulting from the distortion of the actuation waveform by the displacement-dependent electrostatic nonlinearity. This paper emphasizes that this issue should not be overlooked in order to perform quantitative MEMS characterization in the nonlinear regime.[2015-0283] 1 The last two waveforms prove to be very simple to generate in an oscillating loop [12], [14], with other advantages over sinusoidal waveforms (for example, pulsed oscillators do not require feedthrough compensation schemes [16]). 1057-7157

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Measuring Quality Factor From a Nonlinear Frequency Response With Jump Discontinuities

Cited by 40 publications

References 20 publications

Parameter estimation from nonlinear frequency response of MEMS resonators

Parameter estimation from nonlinear frequency response of MEMS resonators

High Performance Piezoelectric Actuators and Wings for Nano Air Vehicles

Influence of the Driving Waveform on the Open-Loop Frequency Response of MEMS Resonators With Nonlinear Actuation Schemes

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