Magnetic field assisted bonding technology for released micro actuator and mirror surface

He, Siyuan

doi:10.1007/s00542-017-3432-7

Cited by 5 publications

(8 citation statements)

References 34 publications

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“…Future development should be worked on the concept proposed in this work, such as adopting rectangular plates for its structure. Table 1 showed the results compared to reference [2,18] which are typical results published. According to Table 1, the actuator design in this work can achieve the mirror plate with 3.6 × 3.6 mm 2 and 350 μm in thickness according to the applications.…”

Section: Journal Of Sensorsmentioning

confidence: 96%

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The Designing of Magnetic-Driven Micromirror for Portable FTIRs

Wang

Xuan

2018

Journal of Sensors

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Fourier transform infrared spectroscopy is a widely used instrument to analyze and test different materials including organic and inorganic. Most of current commercial Fourier transform infrared spectrometers are limited in miniaturization and scanning velocity by their macroscopic components. MEMS FTIR spectroscopy is one of the important applications of translational actuator-driven systems by using MEMS technology. The critical component in MEMS FTIRs is the large displacement translating micromirror and its actuator. The paper presents a large displacement and high-surface quality micromirror. The micromirror consists of a micromagnetic actuator and a micromirror plate. The mirror plate and the actuator are fabricated separately and bonded together afterwards, and its size is 3.6 × 3.6 mm2 high-surface quality square mirror plate and a 1cm2 moving part. The microactuator’s moving part is fabricated using MetalMUMPS, and its fixed part includes a ring permanent magnet and a solenoid to realize a large displacement. The mirror plate is fabricated using polished silicon coated with metal layer with high-surface prototypes that are fabricated and experimentally tested. A maximum stroke of 400 μm has been achieved in pull-in whereas only 140 μm stroke have been measured for a 4 to 5-volt DC-controlled displacement, and the resonance frequency is 10 Hz.

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Section: Journal Of Sensorsmentioning

confidence: 96%

“…To solve these problems, a lot of iterations for tuning the bonding process and designing the bonding structure were conducted till the bonding challenges are completely addressed. All detail information about bonding process can be found in [18].…”

Section: Device Designmentioning

confidence: 99%

The Designing of Magnetic-Driven Micromirror for Portable FTIRs

Wang

Xuan

2018

Journal of Sensors

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“…It is very challenging to bond the released microactuator with the mirror plate without causing any plastic deformation or damage to the released microactuator. A novel bonding technology -"Magnetic field force assisted bonding technology" [147] -has been developed and will be introduced in Chapter 3, which applies non-touching magnetic field force, instead of conventional mechanical force, on the moving part of the released actuator to bring it in contact with the mirror plate. In addition, the bonding pressure is applied through pulling force, instead of compression force as in conventional bonding techniques, so as to avoid any plastic deformation or damage to the released microactuator.…”

Section: Prototypementioning

confidence: 99%

“…which is 4.7% different from the simulation. When the mirror plate is bonded on the central ring of the moving film using the bonding technology developed in [147], no plastic deformation or damage due to the bonding process is found. After the micromirror is assembled, the moving part pre-lifted by the permanent magnet ring is measured.…”

Section: Deformation/displacement Of Moving Film Before Applying Currentmentioning

confidence: 99%

“…Instead, each trapezoidal plate is divided into five areas along its height and all elements in the same area are treated to have the same magnetic force to simulate the deformation.The initial tilting of the moving part of the actuator caused by the fabrication process is insignificant, i.e., less than the noise caused by the microactuator's surface. But the tilting angle of the mirror plate is 0.1° -0.24°, based on measurement on several prototypes with the trench bottom surface as reference after bonding, even when there is no plastic deformation to the moving structure of the actuator caused by the bonding through experimentally measuring 40 points on the moving structure[147]. However, the height of the micromirror decreases by around 10 µm after several movements when current is applied and becomes stable after 10 hours vibration test.…”

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confidence: 99%

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Development of an Electromagnetic Actuator based Translation Micromirror as a Movable Mirror in a Miniaturized FTIR Spectrometer

Yang¹

2023

Preprint

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Miniaturized FTIR spectrometer has been developed rapidly in recent years due to the increasing demands. MEMS micromirrors have been used to replace the movable mirror system, which is the largest part in conventional FTIRs. Electromagnetic actuators are suitable to drive the micromirrors because of their relatively large quasi-static translation range and high response speed. In addition, high surface quality is required for the micromirror. However, current MEMS based micromachining technologies cannot provide satisfactory surface quality. Therefore, a translation mircomirror with a large displacement, i.e., > 120 µm, and a novel magnetic field pulling-force assisted bonding technology are developed to bond a high surface quality (i.e., roughness of 2 nm and radius curvature over 15 m) mirror plate with a released microactuator using an adhesive. However, the touching points between the moving film and the substrate lead to a large starting position variation and low repeatability in operation. To solve these limitations, a repulsive force based translation micromirror utilizes a novel driving mechanism, i.e., permanent magnet ring above and electromagnet underneath the moving film, to lift and push the moving film away from the substrate for translation. As a result, the starting position of the repulsive force translating mirror is consistent and the repeatability is <1%. A maximum displacement of 144 µm can be achieved when a 140 mA current is applied. To eliminate the tilt of the translation micromirror during motion, a compensation system is developed which includes the translation mirror, a correcting mirror and a reflecting mirror. The correcting micromirror corrects the tilt by rotating the same angle as the translation micromirror with its rotating axis parallel to the tilting axis. The tilt of the attractive force translation micromirror can be reduced to 0.026° after compensation, so it can be used as a movable mirror in FTIRs to measure half of the midinfrared region between 13.6 µm an 25 µm. Therefore, the electromagnetic actuator based translation micromirror with large displacement, high surface quality can be successfully used as the movable mirror in the miniaturized FTIRs with the tilt compensation system.

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A translation micromirror with large quasi-static displacement and high surface quality

He¹

2016

J. Micromech. Microeng.

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A large displacement with high surface quality translation micromirror is presented. The micromirror consists of a magnetic actuator and a mirror plate. The actuator and the mirror plate are fabricated separately using two processes and then bonded together. The actuator consists of a moving film which is a 20 µm thick nickel film fabricated by MetalMUMPs and a solenoid located underneath the moving film. The moving film is designed to curve up through the residual stress gradient in the nickel film and a curve-up mechanism which includes four trapezoidal plates and anchoring springs. The mirror plate is simply diced from a polished silicon wafer and coated with a metal thin film. The mirror plate is bonded onto the central ring of the moving film. A solenoid attracts the moving film along with the mirror plate downwards to realize translation. A quasi-static displacement of 123 µm is achieved at a driving current of 400 mA. A high mirror surface quality is realized, e.g. 15.6 m of curvature radius and 2 nm surface roughness.

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Magnetic field assisted bonding technology for released micro actuator and mirror surface

Cited by 5 publications

References 34 publications

The Designing of Magnetic-Driven Micromirror for Portable FTIRs

The Designing of Magnetic-Driven Micromirror for Portable FTIRs

Development of an Electromagnetic Actuator based Translation Micromirror as a Movable Mirror in a Miniaturized FTIR Spectrometer

A translation micromirror with large quasi-static displacement and high surface quality

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