Magnetic bistable micro-actuator with integrated permanent magnets

Dieppedale, C.; Desloges, B.; Rostaing, Hervé; Delamare, Jérôme; Cugat, Orphée; Meunier-Carus, J.

doi:10.1109/icsens.2004.1426208

Cited by 30 publications

(24 citation statements)

References 1 publication

(1 reference statement)

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“…As a result, a new generation of micro-sensors and actuators based on levitation have been demonstrated, covering a wide range of applications, e.g., as microinertial sensors [1]- [4], frictionless micro-bearings [5], [6], bistable switches [7], micro-accelerator [8], linear-micro-actuator [9], and nano-force sensor [10]. We will generally refer to all these devices as contactless suspensions (CS).…”

Section: Introductionmentioning

confidence: 99%

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Poletkin

Wallrabe

et al. 2015

J. Microelectromech. Syst.

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In this letter, we present a new hybrid micromachined contactless suspension based on combining electromagnetic inductive and electrostatic actuation. In addition, the stiffness components are dynamically adjusted during the operation phase using a series of electrodes integrated in the contactless suspension structure. We experimentally demonstrate vertical linear positioning of a disk-shaped proof mass in a range from 30 to 200 µm, controlled tilting about two orthogonal axes in the horizontal plane ranges from ±1°to ±4°, as well as controlled oscillation about the vertical axis with an angular displacement of 37°a t a frequency of 1.5 Hz. In order to demonstrate dynamical adjustment of the stiffness, we experimentally show that the angular component of stiffness is increased by a factor of two at a levitation height of 100 µm. Therefore, the suspension dynamics can be changed and adapted to particular applications or to variations in operational environments. Moreover, we demonstrate that this device can operate as a bistable micro-actuator.[2015-0150] Index Terms-Levitation, contactless suspension, frictionless micro-bearings, inductive suspension, electrostatic suspension, bistable, 3D-micro-coils. 1057-7157

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Section: Introductionmentioning

confidence: 99%

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Poletkin

Wallrabe

et al. 2015

J. Microelectromech. Syst.

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“…16 The integration of high performance NdFeB into a modified version of this micro-switch, by the consecutive application of the processing steps developed in this work (figure 6), is presently being studied. 17 Note that in this process flow the wet etching step is not used to define the final size of the magnet but as a coarse patterning step prior to CMP.…”

Section: Discussionmentioning

confidence: 99%

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Walther

Marcoux

Desloges

et al. 2009

Journal of Magnetism and Magnetic Materials

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The integration of high performance RE-TM (NdFeB and SmCo) hard magnetic films into Micro-Electro-Mechanical-Systems (MEMS) requires their patterning at the micron scale.In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5 µm thick RE-TM films. While NdFeB comprehensively fills micron scaled trenches in patterned substrates, SmCo deposits are characterized by poor filling of the trench corners, which poses a problem for further processing by planarization. The magnetic hysteresis loops of both the NdFeB and SmCo patterned films are comparable to those of non-patterned films prepared under the same deposition/annealing conditions. A micron-scaled multipole magnetic field pattern is directly produced by the unidirectional magnetization of the patterned films. NdFeB and SmCo show similar behavior when wet etched in an amorphous state: etch rates of approximately 1.25µm/minute and vertical side walls which may be attributed to a large lateral over-etch of typically 20 µm. ChemicalMechanical Planarization (CMP) produced material removal rates of 0.5-3µm/min for amorphous NdFeB. Ar ion etching of such films followed by the deposition of a Ta layer prior to film crystallization prevented degradation in magnetic properties compared to nonpatterned films.

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“…The permanent magnet of 1 mm 3 volume was lifted up to 200 µm by generating a levitation force of 20 µN. Dieppedale et al developed and demonstrated a prototype of MLMA, in which a levitating mobile magnet of 5×40×100 µm 3 volume was used [43]. The prototype employed a bistable actuation principle and was used as a micro-switch.…”

Section: Magnetic Levitation Micro-actuatorsmentioning

confidence: 99%

Levitating Micro-Actuators: A Review

et al. 2018

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Through remote forces, levitating micro-actuators completely eliminate mechanical attachment between the stationary and moving parts of a micro-actuator, thus providing a fundamental solution to overcoming the domination of friction over inertial forces at the micro-scale. Eliminating the usual mechanical constraints promises micro-actuators with increased operational capabilities and low dissipation energy. Further reduction of friction and hence dissipation by means of vacuum leads to dramatic increases of performance when compared to mechanically tethered counterparts. In order to efficiently employ the benefits provided by levitation, micro-actuators are classified according to their physical principles as well as by their combinations. Different operating principles, structures, materials and fabrication methods are considered. A detailed analysis of the significant achievements in the technology of micro-optics, micro-magnets and micro-coil fabrication, along with the development of new magnetic materials during recent decades, which has driven the creation of new application domains for levitating micro-actuators is performed.

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Magnetic bistable micro-actuator with integrated permanent magnets

Cited by 30 publications

References 1 publication

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Levitating Micro-Actuators: A Review

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