Mach-Zehnder interferometer using a long-range surface plasmon polariton waveguide coupler

Sakaidani, Takahide; Fujii, Go; Fujikake, Akihito; Namekata, Naoto; Fukuda, Daiji; Inoue, Shuichiro

doi:10.1117/12.930270

Cited by 1 publication

(1 citation statement)

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“…Due to characteristics of low cost, easy fabrication, and flexibility, polymers are widely used for optical routing in different devices [6]. Recently, plasmonic structures with thin metal stripes embedded in polymer materials have exhibited potential in the application of splitters, modulators, switches, gratings, attenuators, and chip-to-chip or board-to-board interconnects [7][8][9][10][11][12][13]. Surface plasmon polaritons (SPPs) are waves of longitudinal charge oscillations of the conduction of electrons at the metal surface.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of long-range surface plasmon polaritons waveguide by wet chemical etching

Xie

Liu

Zhao

et al. 2014

J. Opt.

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The fabrication of long-range surface plasmon polaritons (LRSPPs) waveguides based on a thin Au stripe embedded in poly(methyl-methacrylate-glycidly-methacrylate) polymers was investigated. By patterning the photoresist, a wet chemical etching technique was used to avoid sharp pin-like and shark-fin-like structures on the edges of the Au stripe. The surface morphology of the Au film and polymer cladding were studied by atomic force microscopy (AFM), as well as by using the waveguide configuration of the Au stripe. AFM images proved the elimination of parasitic structures. A 2 cm long, 4 μm wide, and 25 nm thick Au stripe waveguide exhibited a propagation loss of approximately 4.3 dB cm −1 measured by the cutback method and end-fire excitation of LRSPP mode guiding at 1550 nm. The demonstration of optical signal transmission indicates that the LRSPP waveguide fabricated by wet chemical etching is a potential solution to on-chip optical interconnections.

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