Low pressure chemical vapor deposition of niobium coatings on graphite

Liu, Qiaomu; Zhang, Litong; Cheng, Laifei

doi:10.1016/j.vacuum.2010.07.006

Cited by 13 publications

(3 citation statements)

References 13 publications

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“…Chemical vapor deposition (CVD) of Nb films, in addition to sputtering [9,10,11] and epitaxy [12], were studied on silicon-carbide and graphite substrates using NbCl 5 and NbBr 5 precursors [13,14,15]. This vapor-based technique is suitable for coating the inner surface of cavities with intricate shapes.…”

Section: Introductionmentioning

confidence: 99%

Electrochemical Polishing of Chemical Vapor Deposited Niobium Thin Films

Sun¹,

Ge²,

Arrieta³

et al. 2023

Preprint

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Section: Introductionmentioning

confidence: 99%

Electrochemical Polishing of Chemical Vapor Deposited Niobium Thin Films

Sun¹,

Ge²,

Arrieta³

et al. 2023

Preprint

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“…Niobium coatings can be deposited in a variety of ways: physical vapor deposition (PVD), magnetron sputtering (2)(3)(4), ion beam assisted deposition (IBAD) (5) and chemical vapor deposition (CVD) (6)(7)(8). The most convenient method for deposition coatings on spherical samples is electrolysis.…”

Section: Introductionmentioning

confidence: 99%

(Digital Presentation) Electrodeposition of Electrolytic Niobium Coatings on the Cryogyroscope Rotor

Okunev¹,

Dubrovskii²,

Макарова³

et al. 2022

ECS Trans.

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The discharge process of Nb(IV) complexes to Nb was studied by cyclic voltammetry. A galvanostatic electrolysis with the cathodic current density of 1.5·10-2 A cm-2 in the NaCl-KCl-NaF-K2NbF7 melt in contact with Nb was used for deposition of niobium coatings at temperature 1023 K, and time of process from 8 to 12 hours. The coatings were continuous and smooth due to the special design of the cathode. The rotation speed of the stirrer in all experiments did not change and was chosen equal to 35 rpm. Such conditions made it possible to obtain coatings with the thickness up to 150 μm. The main characteristics of the niobium coatings such as purity, roughness, nonsphericity and superconductivity were investigated.

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“…The authors of [5][6][7][8] performed a qualitative analysis of the efficiency of coating deposition across different methods. The respective criteria were divided into three groups: possibilities of obtaining and controlling the process parameters, providing quality parameters, and technological and cost indices.…”

Section: Introductionmentioning

confidence: 99%

Superconducting Niobium Coatings Deposited on Spherical Substrates in Molten Salts

Dubrovskiy¹,

Okunev²,

Макарова³

et al. 2018

Coatings

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Abstract:The interaction of substrates from ceramics, beryllium, and carbopyroceram with the electrolyte for the electrodeposition of niobium coatings was investigated. The corrosion resistance of spherical ceramic and beryllium samples with the protective molybdenum films obtained by magnetron sputtering was studied. The exfoliation of molybdenum film from ceramics and beryllium samples was observed after the experiments due to the interaction of substrates with the melt. It was found that the carbopyroceram did not corrode in the niobium containing melt and this material was chosen as the substrate for the electrodeposition of superconducting niobium coatings. The influence of the oxide ions on the electrochemical behavior of niobium complexes in the NaCl-KCl-NaF-K 2 NbF 7 melt was studied. A special form of the cathode was constructed for the electrodeposition of niobium coatings on spherically shaped substrates. Electrodeposition of the niobium coatings on spheres 10 mm in diameter manufactured from carbopyroceram was carried out at 750 • C with the cathodic current density of 5 × 10 −3 -2 × 10 −2 A·cm −2 and the electrolysis time of 8-12 h. Influence of the cathodic current density on the microstructure of niobium coatings was studied. The roughness, nonsphericity, and superconductive properties of niobium coatings were determined.

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Low pressure chemical vapor deposition of niobium coatings on graphite

Cited by 13 publications

References 13 publications

Electrochemical Polishing of Chemical Vapor Deposited Niobium Thin Films

Electrochemical Polishing of Chemical Vapor Deposited Niobium Thin Films

(Digital Presentation) Electrodeposition of Electrolytic Niobium Coatings on the Cryogyroscope Rotor

Superconducting Niobium Coatings Deposited on Spherical Substrates in Molten Salts

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