2011
DOI: 10.1021/nl202539m
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Localized Joule Heating As a Mask-Free Technique for the Local Synthesis of ZnO Nanowires on Silicon Nanodevices

Abstract: We report a mask-free technique for the local synthesis of ZnO nanowires (NWs) on polysilicon nanobelts and polysilicon NW devices. First, we used localized joule heating to generate a poly(methyl methacrylate) (PMMA) nanotemplate, allowing the rapid and self-aligned ablation of PMMA within a short period of time (ca. 5 μs). Next, we used ion-beam sputtering to prepare an ultrathin Au film and a ZnO seed layer; a subsequent lift-off process left the seed layers selectively within the PMMA nanotemplate. Gold na… Show more

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Cited by 19 publications
(19 citation statements)
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“…Synthesizing nanomaterials onto silicon substrates is attracting much attention. [19][20][21][22][23] One key reason is that once nanomaterials are synthesized onto silicon substrates, it is straightforward to integrate the nanomaterials with silicon based electronic circuits to achieve functional devices. Furthermore, the Co 3 O 4 nanowalls and nanowires fabricated onto Co foil substrates are not firmly attached to the substrate (easy to be peeled off).…”
Section: O 4 Nanowalls and Nanowires On Silicon Substrates I Introdumentioning
confidence: 99%
“…Synthesizing nanomaterials onto silicon substrates is attracting much attention. [19][20][21][22][23] One key reason is that once nanomaterials are synthesized onto silicon substrates, it is straightforward to integrate the nanomaterials with silicon based electronic circuits to achieve functional devices. Furthermore, the Co 3 O 4 nanowalls and nanowires fabricated onto Co foil substrates are not firmly attached to the substrate (easy to be peeled off).…”
Section: O 4 Nanowalls and Nanowires On Silicon Substrates I Introdumentioning
confidence: 99%
“…In FEF, the heat source is provided by the electric voltage. FEF can be explained as follows: (a) micro/nano heater, connected to a constant electric current, is immersed in aqueous ZnO precursors for increasing the temperature at the desired hot spot; (b) by endothermal reaction, nanomaterials are synthesized at local heated spots until the electric power is disconnected [ 24 , 66 , 67 ].…”
Section: Zno Selective Hydrothermal Growthmentioning
confidence: 99%
“… Schematic illustration of localized heat hydrothermal growth: ( a ) Joule heating, reproduced with permission from Reference [ 67 ]; ( b ) laser heating, reproduced with permission from Reference [ 102 ]. …”
Section: Figurementioning
confidence: 99%
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“…Similar lithography-free techniques have also been proposed for sensor applications [13], study of biological and chemical phenomena [14], catalytic NW growth [15], and selective removal of metallic CNTs [16]. Localized heating has also been used as a simple patterning approach for nanoscale positioning [17][18][19]. Microheaters have been studied for selective functionalization of sensors [20] and catalytic synthesis of nanomaterials [18].…”
Section: Introductionmentioning
confidence: 99%