1999
DOI: 10.1016/s0378-7753(98)00202-x
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Lithium silicon tin oxynitride (LiySiTON): high-performance anode in thin-film lithium-ion batteries for microelectronics

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Cited by 125 publications
(56 citation statements)
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“…The best candidate exhibiting good cycling stability and large capacity is Li 2.6 Co 0.4 N with 700mAh/g. Some nitrides such as silicon tin oxynitride [36,37], Sn 3 N 4 , [36,38], and InN [38] have been reported to undergo, upon reaction with Li, an irreversible conversion reaction, generating a Li 3 N [39-43] matrix as follows:…”
Section: Nitridesmentioning
confidence: 99%
“…The best candidate exhibiting good cycling stability and large capacity is Li 2.6 Co 0.4 N with 700mAh/g. Some nitrides such as silicon tin oxynitride [36,37], Sn 3 N 4 , [36,38], and InN [38] have been reported to undergo, upon reaction with Li, an irreversible conversion reaction, generating a Li 3 N [39-43] matrix as follows:…”
Section: Nitridesmentioning
confidence: 99%
“…For example, monometallic and bimetallic oxynitrides have been investigated as catalysts, 1 silicontin and lithium-phosphorus oxynitrides have been applied in thin-film lithium-ion batteries for microelectronics, 2 and other oxynitrides have been investigated for either their properties ͑ZrON, 3 CuON, 4 TaON, 5 NbON͒ 6 or for specific applications like gas sensors ͑InON͒, 7 transparent and conductive layers in optoelectronic devices ͑InON, 8 ZnON, 9 TiON͒ 10 and optical or hard coatings ͑TiON, 10 SiON͒. 11 Reactive sputtering is the predominant deposition technique employed to fabricate these oxynitride thin films from either an elemental target in O 2 -N 2 -Ar gas mixtures or an oxide target in N 2 -Ar plasma.…”
Section: Introductionmentioning
confidence: 99%
“…Subsequently, there have been considerable efforts in finding new materials to replace the existing lithium battery anode [4][5][6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%