Abstract:A dual redox process involving Ti 3+ /Ti 4+ cation species and S 2-/(S 2 ) 2-anion species is highlighted in oxygenated lithium titanium sulfide thin film electrodes during lithium (de)insertion, leading to a high specific capacity. These cathodes for all-solid-state lithium-ion microbatteries are synthesized by sputtering of LiTiS 2 targets prepared by different means. The limited oxygenation of the films that is induced during the sputtering process favors the occurrence of the S 2-/(S 2 ) 2-redox process at the expense of the Ti 3+ /Ti 4+ one during the battery operation, and influences its voltage profile. Finally, a perfect reversibility of both electrochemical processes is observed, whatever the initial film composition. All-solid-state lithium microbatteries using these amorphous lithiated titanium disulfide thin films and operated between 1.5-3.0 V/Li + /Li deliver a greater capacity (210-270 mAh g -1 ) than LiCoO 2 , with a perfect capacity retention (-0.0015 % cycle -1 ).