MRS Proc. 2000 DOI: 10.1557/proc-624-127 View full text
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D.K. Sengupta, N.R. Quick, A. Kar

Abstract: ABSTRACTConventional direct write processes are multi-step requiring at least one additional process to change conductive properties. A direct conversion technique that uses lasers to irradiate silicon carbide, providing tracks which are highly conductive has been demonstrated. It was found that laser irradiation of insulating silicon carbide films could cause a drop from 1011 to 10−4 ohm-cm in a 4-point resistance test. However, in the presence of pure oxygen, laser-irradiated silicon carbide conductor and se…

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