Laser crystallization studies of barium strontium titanate thin films

Low-temperature crystallization of CSD-derived PZT thin film with laser annealing

“…It was reported that below a pyrolysis temperature of approximately 350 • C, the organic residues of the precursor solution in the BST film decomposed to give the destroyed film structure consisting of droplets [21,22]. In this experiment the PZT films were pre-annealed below 300 • C. Probably, the pre-annealed PZT films contained some amount of organic residues, resulting in the cracking by droplet formation in the films.…”

“…On the other hand, the phase development of ferroelectric thin films after excimer laser annealing was dependent on several parameters, i.e. laser pulsed rate [10], average LEF, and the number of laser pulses [21,22].…”

“…It was also reported that epitaxially growth of PZT thin films was observed on SrTiO 3 (STO) substrate by eximer laser irradiation at fluence of 50-90 mJ/cm 2 with a repetition rate of 10 Hz for 1 min, at room temperature [8]. Baldus and Waser investigated a laser annealing process of CSD-derived BST thin films, and reported that the upper limit of the energy density for laser annealing of Ba x Sr 1−x TiO 3 (BST) thin films was given by the occurrence of ablation or cracks in the treated film [21,22].…”

Structural and electrical investigation of laser annealed (Pb,Sr)TiO3 thin films

“…The noble metal platinum ͑Pt͒ is used as the electrode of the Pt/ PSrT / Pt capacitor because of its low power consumption and low resistive capacitive delay, 6 compared to the conductive oxide. [17][18][19][20][21] However, the accumulated laser energy on physical/electrical properties of PSrT films has not been addressed much. [12][13][14][15][16] Some studies of the properties of PZT and ͑Ba, Sr͒TiO 3 ͑BST͒ films post-treated by ELA have been reported.…”

Low-temperature crystallized pyrochlore bismuth zinc niobate thin films by excimer laser annealing

“…8,9 Reports about laser crystallization of ceramic thin films, however, are very limited. 10 The possibility of a phase transformation from amorphous to x-ray crystalline has been demonstrated in SrFe 0.5 Co 0.5 O 2.5+x films. 11 Electrical data, however, are missing in many cases, probably because of damage induced by laser processing.…”