a b s t r a c tWe have successfully fabricated planar patterned CrPt 3 ordered L1 2 alloy films by Kr + ion irradiation. Planar-patterned CrPt 3 nanodots with various bit sizes from 200 nm to 50 nm were successfully fabricated by 30 keV Kr + ion irradiation at a dose of 2 Â 10 14 ions/cm 2 , where e-beam lithography was used for creating the resist mask. We have confirmed that the nanofabrication process didn't change the magnetic properties of CrPt 3 ordered L1 2 alloy films. As-prepared film exhibited perpendicular hysteresis loop with the coercivity of 5.5 kOe. The typical perpendicular maze domain structure with the stripe structure was clearly seen in as-prepared CrPt 3 film. Magnetic force microscopy (MFM) images of patterned CrPt 3 nanodots indicated that each un-irradiated bit consists of localized perpendicular magnetic domain structures, which corresponds to perpendicular magnetization direction. Nanodots with bit size 680 nm show either dark or bright contrast, suggesting single domain structure. No magnetic contrast in irradiated space is due to the suppressing of the magnetization by Kr + ion irradiation.