Porous layers were formed on highly resistive p-type silicon by an Ag-assisted electroless etching method using a chemical solution of HF and K 2 Cr 2 O 7 . The porous silicon (PS) layer formed by this method as a function of etching time was investigated by scanning electron microscopy (SEM) and backscattering spectrometry (BS) in random and channelling mode. Channelling spectra show that the porous layer remains crystalline after etching. On the other hand, random and channelling spectra show that the deposited silver diffuses into the pore. Luminescence from Ag-assisted chemically etched layers was measured. It was found that the photoluminescence spectra strongly depend on etching time. Indeed, for etching time lower than 60 min, the PL emission is in the blue region with a peak located at 450 nm. In addition, for an etching time of 60 min or higher, the PL peak is centred at about 630 nm.