Kilovolt electron energy loss distribution in Si

Abstract

Using the electron-beam-induced barrier currents and the Monte Carlo simulation methods it was possible to determine the depth-dose function as well as the distribution function of the generation source for electron-hole pairs perpendicular to the injection direction. The depth-dose function was compared with results obtained by Everhart and Hoff. By fitting the simulated barrier current profile to the measured one the authors could estimate the relatively small width of the space charge region of the p-n junction employed for the measurements. Furthermore, the spatial dose distribution of Si was described in an analytic approximation of the Monte Carlo simulation using two Gaussian functions concerned with the spreading of the penetrating electron beam and the diffusion of the primary electrons within the target, respectively. This approximation was based on treatments of the scattering process of the primary electrons given by Bethe and co-workers, Bothe and Archard.

Benchmark study of the recent version of the PHITS code

“…Figure 22 shows the depth-dose distributions at the central axis of Si for an electron beam with energies of 15, 30, 40, and 50 keV [53,54]. The cut-off energy of the electrons and positrons was set to 1 keV.…”

Quantitative description of the properties of extended defects in silicon by means of electron- and laser-beam-induced currents

“…For the LBIC method, we used the approximation of a generation function proportional to the laser beam intensity [7], i.e., g(x, y, z) = , where σ is the beam width, and M is the photon absorption coefficient, i.e., the quantity determining the penetra tion depth. In the case of the EBIC method, for the generation function determination of the Werner model [8] was used. In contrast to the frequently used Donolato model [9], it takes into account the effect of …”

MARS15 code developments driven by the intensity frontier needs

“…Experimental data of the HARP collaboration [3] covers angles from 20° to 123°. This data could be also successfully fitted by the two-source model with χ 2 /n ~ 1 for any HARP momentum (3,5,8,12 GeV/c). If other measurements at large angles are included into fitting procedure, quality of the fit becomes slightly worse (χ 2 /n ~ 2), but still is acceptable.…”