2013 E-Manufacturing &Amp; Design Collaboration Symposium (eMDC) 2013
DOI: 10.1109/emdc.2013.6756059
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Iterative Backward Elimination PLSR: A novel PLS-based modeling technique to eliminate noise components for VM solutions

Navjot Kumar
1
,
P.H. Tsai
2
,
Clark Song
3
et al.

Abstract: Virtual Metrology (VM) solutions are becoming increasingly popular in the semiconductor

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