2018
DOI: 10.1088/1361-6528/aae01e
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Ionic liquids—a novel material for planar photonics

Abstract: Electron beam patterning is an important technology in the fabrication of miniaturized photonic devices. The fabrication process conventionally involves the use of radiation sensitive polymer-based solutions (called resists). We propose to replace typical polymer resists with eco-friendly solvent-free room temperature ionic liquids (RTILs), which are polymerized in situ and solidified by an electron beam. It is demonstrated that the shapes of polymerized structures are different for high-viscous Cl-based RTILs… Show more

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Cited by 11 publications
(15 citation statements)
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References 57 publications
(57 reference statements)
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“…The packet compression and decompression may prove useful in high-speed communication and signal processing, including multiplexers. For further optimization and showing the effect of RTIL infiltrated, the square slots are assumed to be filled by ionic liquid whose reflective index is from 1.6 to 1.7 for optical communication wavelength [ 11 ]. The main factor for the theoretical calculations is the refractive index.…”
Section: Structure Geometry and Simulation Resultsmentioning
confidence: 99%
See 3 more Smart Citations
“…The packet compression and decompression may prove useful in high-speed communication and signal processing, including multiplexers. For further optimization and showing the effect of RTIL infiltrated, the square slots are assumed to be filled by ionic liquid whose reflective index is from 1.6 to 1.7 for optical communication wavelength [ 11 ]. The main factor for the theoretical calculations is the refractive index.…”
Section: Structure Geometry and Simulation Resultsmentioning
confidence: 99%
“…Nanomaterials 2020, 10, x FOR PEER REVIEW 7 of 12 the effect of RTIL infiltrated, the square slots are assumed to be filled by ionic liquid whose reflective index is from 1.6 to 1.7 for optical communication wavelength [11]. The main factor for the theoretical calculations is the refractive index.…”
Section: Structure Geometry and Simulation Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…The aforementioned research motivated us to find a more ecofriendly process which makes use of unique properties of ionic liquids even more so. Therefore, we proposed the electron beam fabrication method of planar photonic components wherein the spin-coating step is conducted without any solvent (i.e., using pure ionic liquid), and only ethanol is used as a developer . The elimination of the solvent evaporation step from the RTIL thin film preparation procedure made the whole process greener and safer and opened new possibilities for processing solvent nonresistant substrates and materials.…”
Section: Introductionmentioning
confidence: 99%