Doped nanotube has a potential step of a few eV at the junction responsible for the nonlinear conductivity so that the nano diode can be manufactured. In order to dope the N or P elements into nanotubes, it is n e c e s s q to open the end of the tubes. Here the ion irradiation method to open the end of the tubes was introduced. Experiments were carried out with various ion energies and fluxes of the irradiated ions
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