Superlattices and Microstructures volume 46, issue 1-2, P149-152 2009 DOI: 10.1016/j.spmi.2008.11.013 View full text
A. Notargiacomo, L. Di Gaspare, F. Evangelisti

Abstract: We present morphological and electrical characterizations of thin and narrow resistors obtained by focused ion beam assisted deposition of Pt based material. For thin and narrow depositions the measured thickness and width are significantly different from the nominal values. From leakage tests we found that in order to have electrically insulated parallel resistors at room temperature, it is mandatory that the Pt-halo, which results from the deposition procedure, has a thickness well below 6 nm. (C) 2008 Elsev…

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