Investigation of BCN Films Deposited at Various$hboxN_2/hboxAr$Flow Ratios by DC Reactive Magnetron Sputtering

Xu, Shuyan; Ma, Xinxin; Su, Mingren

doi:10.1109/tps.2006.879179

Cited by 14 publications

(14 citation statements)

References 23 publications

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“…18 The peaks centered at 187.6 and 192.1 eV in Fig. 16,21,23 Both the B1s and the N1s spectra signify that the sp 2 B-N bonding (as in h-BN) is the main configuration for B and N atoms in the present nanosheets. 16,19-21 C has a lower electronegativity than N, therefore due to the lower charge displacement from B to C compared to that from B to N, the B-C subspectrum is observed at a lower binding energy than the B-N subspectrum.…”

Section: Resultsmentioning

confidence: 81%

“…3b. 15,16,19,[26][27][28] The blue shift of the out-of-plane bending mode to $809 cm À1 (usually reported at 780 cm À1 ) in the present nanosheets can be due to the increase in the bond stiffness, induced by the incorporation of non-BN bonds in the hexagonal network. The broad strong absorption peak at $1380 cm À1 and the peak at $809 cm À1 can be attributed to the in-plane stretching and out-ofplane bending vibration of B-C-N rings, respectively.…”

Section: Resultsmentioning

confidence: 94%

“…16,19-21 C has a lower electronegativity than N, therefore due to the lower charge displacement from B to C compared to that from B to N, the B-C subspectrum is observed at a lower binding energy than the B-N subspectrum. The shoulders at 286.3 and 282.2 eV correspond to C-N and B-C bonds, respectively, 16,20,21 indicating the existence of boundaries between the h-BN and graphitic regions. The B-O signal, on the other hand, originates from the oxidation of some B atoms at the surface of the sample and is observed at a higher binding energy than the B-N signal due to the higher electronegativity of O compared to that of N. The N1s spectrum in Fig.…”

Section: Resultsmentioning

confidence: 99%

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Facile synthesis of vertically aligned hexagonal boron nitride nanosheets hybridized with graphitic domains

et al. 2012

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Motivated by the recent quest for producing novel two dimensional nanomaterials, we developed a facile synthetic method for growing boron nitride-carbon (BN-C) phase-separated composite nanosheet coatings on silicon/silicon dioxide (Si/SiO 2 ) substrates. The coatings were composed of compact partially vertically aligned nanosheets with a nanoscale roughness. The majority of the obtained BN-C nanosheets were less than 5 nm in thickness, mostly consisting of 2-15 atomic layers. Electron energy loss spectroscopy, Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy revealed the natural sp 2 hybridization of the product, and cathodoluminescence spectroscopy measurements showed strong luminescence emission in the ultraviolet region at room temperature. Ultraviolet-visible spectroscopy demonstrated that the composite structure of alternating BN and C domains has different optical band gap features compared to pure h-BN nanosheets and graphenes, making it a promising material for further fundamental physical studies and potential applications in optoelectronics. Moreover, due to the rough morphology and nanoscale features of the BN-C coatings, they exhibited excellent water repellency (superhydrophobicity).

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Section: Resultsmentioning

confidence: 81%

Section: Resultsmentioning

confidence: 94%

Section: Resultsmentioning

confidence: 99%

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Facile synthesis of vertically aligned hexagonal boron nitride nanosheets hybridized with graphitic domains

et al. 2012

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“…They concluded that the hierarchy of energetic stability of bonds in BCN follows the sequence B–N > C–C > C–N > C–B > B–B > N–N. The same conclusion was reached despite the different depositions method used in these studies, namely plasma CVD [ 20 , 29 ], ion-beam-assisted deposition [ 22 , 30 ], magnetron sputtering [ 31 ], pulse laser deposition [ 32 ], or laser abration [ 33 ].…”

Section: Resultsmentioning

confidence: 77%

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

et al. 2021

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Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid process under various coating conditions, and the correlations between the film’s structure and mechanical properties were clarified. Glow discharge optical emission spectroscopy, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and Raman spectroscopy were used to analyze the structural properties and chemical composition. Nanoindentation and ball-on-disc tests were performed to evaluate the hardness and to estimate the friction coefficient and wear volume, respectively. The results indicated that the mechanical properties strongly depend on the carbon content in the film; it decreases significantly when the carbon content is <90%. On the other hand, by controlling the contents of boron and nitrogen to a very small amount (up to 2.5 at.%), it is possible to synthesize a film that has nearly the same hardness and friction coefficient as those of an amorphous carbon (a-C) film and better wear resistance than the a-C film.

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“…Various techniques, such as chemical vapor deposition (CVD), 5,6 pulsed laser deposition (PLD), 7,8 ion beam deposition 9 and sputtering 10 have been used to prepare BCN thin films. The BCN films of diverse compositions have been prepared by magnetron sputtering, mainly from co-targets or mixed target (h-BN and graphite).…”

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confidence: 99%

Effect of Substrate Temperature on Optical Properties of BCN Thin Films

Todi

Sundaram

2011

Electrochem. Solid-State Lett.

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The amorphous boron-carbon-nitrogen (BCN) thin films were prepared by RF magnetron sputtering from a B 4 C target in argon and nitrogen gas ambient. The substrate temperature was varied from room temperature to 500 C. The structural and bonding characteristics were studied by X-ray photoelectron spectroscopy (XPS) and the optical properties were characterized by UV-Visible spectrophotometer. For different substrate temperatures, the optical band gaps (E opt ) ranged from 3.5-4.8 eV and refractive index were in the range of 2.66-1.5. The reported band gap values are significantly higher than the band gap values usually reported elsewhere in the literature for sputter deposited BCN thin films.Ternary compound of boron carbon and nitrogen (BCN) has gained considerable interest due to its potential applications in electronic, optoelectronic and luminescent devices 1,2 For optical applications, the deposition of BCN coatings on polymers is a promising method for protecting the polymer surface. 3 Weber et al. reported that the BCN films can be used as mask substrates for X-ray lithography due to their optical transparency. 4 The ability to control the band gap energy and the refractive index may make it possible to develop optical components such as filters and mirrors for use in the UV wavelength region.Various techniques, such as chemical vapor deposition (CVD), 5,6 pulsed laser deposition (PLD), 7,8 ion beam deposition 9 and sputtering 10 have been used to prepare BCN thin films. The BCN films of diverse compositions have been prepared by magnetron sputtering, mainly from co-targets or mixed target (h-BN and graphite). Yap et al. used nitrogen ion bombardment to adjust the quantities of C and BN plumes from graphite and h-BN targets. 11 Numerous works have been reported describing the bonding characteristic of BCN films. However, little attention has been paid to the study the correlation between the optical properties and the deposition conditions. M. K. Lei et al. studied the optical properties of BCN films with different deposition temperatures. 12 In this study they used magnetron sputtering from a mixed target of h-BN and graphite to deposit BCN films. The reported band gap values by them varied from 1.48 to 2.00 eV as the substrate temperature was increased from 250 to 550 C. Sputtering from a mixed target of h-BN and graphite suffers from the limitation of less boron incorporation in the films which results in minimal variation in the optical band gaps.No systematic results have been reported on the correlation between the optical properties of the BCN films and the deposition temperature prepared by sputtering from a single B 4 C target. Hence, in this paper we report for the first time the effect of substrate heating temperature on the optical properties of the BCN films prepared by sputtering from B 4 C target. The band gaps reported in this study are by far the highest band gaps observed for BCN films prepared by sputtering. The composition and structure of the films were examined by X-ray photoelectron s...

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Investigation of BCN Films Deposited at Various$hboxN_2/hboxAr$Flow Ratios by DC Reactive Magnetron Sputtering

Cited by 14 publications

References 23 publications

Facile synthesis of vertically aligned hexagonal boron nitride nanosheets hybridized with graphitic domains

Facile synthesis of vertically aligned hexagonal boron nitride nanosheets hybridized with graphitic domains

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Effect of Substrate Temperature on Optical Properties of BCN Thin Films

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