Introduction to Microelectromechanical Systems (MEMS): Design and Application

Abstract

This chapter discusses some aspects of the design of microelectromechanical systems (MEMS) devices, and describes the structure of some of those devices. The fact that the field of MEMS largely grew out of the integrated circuit (IC) industry has been noted often. To verify that the devices function, the designer has to model the MEMS device. The modeling involves writing the equation of motion or physical modeling of the performance of the device. Finite‐element techniques are used to solve these modeling equations. There are a variety of computer‐aided design (CAD) tools to aid the designer in the simulation and modeling of the device. After designing and simulating MEMS and deciding on the materials they will contain and the processes needed to make them, the next concern is which fabrication facility to employ. The materials and microfabrication processes used are unlimited to realize MEMS devices.