Internal ringing effect in capacitive micromachined Ultrasonic Transducer

Abstract

The effect of internally resonance at silicon substrate in capacitive micromachined Ultrasonic Transducer presented using Experimental and theoretical calculation. This ringing is clearly observed in immersion transducers with 4.2 MHz. A mathematical analytical model of the attenuation yield by ringing effective and simulation has been introduced. Experimental results are further compared to simulations carried out in timedomain and qualitative agreement is evidence. The insights gained from the simulations and experiments will be use to improve the analytic echoscope. The capacitive micromachined Ultrasonic Transducer whose ringing mode is successfully eliminated with backing layer.