Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Yeh, J. Andrew; Jiang, Hongrui; Tien, Norman C.

doi:10.1109/84.809061

Cited by 100 publications

(61 citation statements)

References 22 publications

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“…There have been many efforts to employ vertical comb actuators fabricated on SOI wafers [2]- [4]. The high force density of a vertical comb drive actuator enables low voltage and large displacement actuation of these high-aspect SOI structures.…”

Section: Ilicon-on-insulatormentioning

confidence: 99%

Vertical Combdrive Based 2-D Gimbaled Micromirrors With Large Static Rotation by Backside Island Isolation

Kwon

Milanović

Lee

2004

IEEE J. Select. Topics Quantum Electron.

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Abstract-We introduce a backside island isolation method for silicon-on-insulator (SOI)-based microelectromechanical systems technology and demonstrate vertical comb drive-based two-dimensional gimbaled micromirrors with large static rotation using the isolation method. The proposed isolation method provides electrical isolation and mechanical coupling of SOI structures without additional dielectric backfill and planarization by utilizing timed etched backside handle wafer structures. The backside island is a hidden layer beneath the gimbal and allows independent application of actuation potentials to the gimbal and inner mirror. We developed the fabrication process that accommodates the backside island isolation structures into an established vertical comb drive process, thereby allowing implementation of two-axis gimbaled structures. The maximum static optical deflections of the gimbal and mirror are 46 and 15 , respectively. Index Terms-Backside island isolation, deep reactive ion etching (DRIE), micromirror, raster scanning, silicon-on-insulator (SOI), two-axis scanner, two-dimensional (2-D) scanner, vertical combdrive.

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Section: Ilicon-on-insulatormentioning

confidence: 99%

Vertical Combdrive Based 2-D Gimbaled Micromirrors With Large Static Rotation by Backside Island Isolation

Kwon

Milanović

Lee

2004

IEEE J. Select. Topics Quantum Electron.

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“…Propagation through a distance Propagation through a lens (31) Equations (29)-(31) may be used to simulate propagation through an unfolded cross connect. If any mirror surface is spherically curved, its effect may also be modeled by replacing it with an equivalent spherical lens, and using the algorithm once more.…”

Section: Numerical Algorithmmentioning

confidence: 99%

“…This problem may be alleviated by a nonlinear elastic suspension [30]. Alternatively, a comb drive may be used instead of a parallel plate drive [31]- [33].…”

Section: Introductionmentioning

confidence: 99%

Scaling laws for MEMS mirror-rotation optical cross connect switches

Syms

2002

J. Lightwave Technol.

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Abstract-The design of large-scale mirror-rotation free-space optical cross-connect switches based on arrays of microelectromechanical torsion mirrors is considered. The layout of a compact switch is first presented. The parameters of the Gaussian beam that maximizes the port count for a given mirror turn angle is then identified, and the supporting optical system needed to create the desired beam is defined. Scaling laws for the optical path length needed for a given number of ports are then derived. Numerical simulations are used to verify the ideal configuration, and scaling laws are proposed for various departures from the ideal. It is shown that ideal operation can still be maintained when the mirrors are curved, and operating conditions that minimize the effect of mirror curvature are identified.

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“…In one design for torsional actuators Hah and co-workers interleaved vertically aligned comb-finger sets with planarized polysilicon structures [3] using a process employing chemical-mechanical polishing (CMP) to achieve both higher frequencies and larger scan angles than those obtained in earlier designs built with lateral comb-drives. Other vertically aligned comb-drive designs have been fabricated using polysilicon-on-SOI [4] or single-crystal silicon coupled with a wafer-bonding technique [5]. Krisnamurthy and Solgaard demonstrated a self-aligned vertical comb [6] made using wafer-bonding, grinding, and polishing, in addition to an anisotropic-etch step of single-crystal silicon.…”

mentioning

confidence: 99%

Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon

Kim

Choo

Lin

et al. 2006

J. Microelectromech. Syst.

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Abstract-In this paper, we describe angular vertical-combdrive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95 kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40V dc plus 13V pp . After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.[1550]

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Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Cited by 100 publications

References 22 publications

Vertical Combdrive Based 2-D Gimbaled Micromirrors With Large Static Rotation by Backside Island Isolation

Vertical Combdrive Based 2-D Gimbaled Micromirrors With Large Static Rotation by Backside Island Isolation

Scaling laws for MEMS mirror-rotation optical cross connect switches

Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon

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