Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry

Chiu, Ming Hung; Wang, Shinn Fwu; Chang, Rong Seng

doi:10.1364/ao.43.005438

Cited by 58 publications

(26 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Among the various measurement schemes [1][2][3][4][5][6][7][8][9], the measurement angle ranges and resolutions are all different, and most of the methods have a limited tradeoff relationship between them. It is desirable to have an accurate angle measurement resolution over a wide-angle measurement range.…”

Section: Resultsmentioning

confidence: 99%

“…The phase curves of the TIR transducers are smoother than those of the SPR measurements. The sensitivity is lower than the SPR, but with a wider range of scanning angles [4].…”

Section: Introductionmentioning

confidence: 90%

“…To achieve precision control for nanometer resolution, optical remote measurements have the advantage of being non-contact, and are easily performed using an optical interferometer. There are various optical methods of precision angle measurement, such as using surface plasmon resonance (SPR), total internal reflection (TIR), Fabry-Perot resonator, white-light interferometry, and imaging displacement sensing [1][2][3][4][5][6][7][8][9]. In optical metrology, the amplitude or phase of a reflected and refracted probe light is dependent on an incident angle in the optical transducer.…”

Section: Introductionmentioning

confidence: 99%

“…The optical phase delay between two orthogonal polarizations (p-and s-wave) of the probe light is dependent on incident angle, the thickness of the birefringent plate and the refractive index (RI) of immersed liquids. In comparison with SPR and TIR transducers [1][2][3][4][5][6], the proposed birefringent-type OAS does not require a precise setting of the specific angle. It can also provide sufficient sensitivity and wide dynamic measurements.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

Twu

Wang

2016

Applied Sciences

View full text Add to dashboard Cite

Abstract:In this paper, an optical angle sensor with a birefringent transducer for measuring angular displacement based on a heterodyne interferometry is proposed. The achievable repeatability and linearity provide sufficient evidence for the practical use. As a result, a resolution of 5.8ˆ10´6 with a dynamic range of 5˝has been achieved by utilizing a KTP (potassium titanyl phosphate) plate immersed in a high refractive index oil with refractive index of 1.7.

show abstract

Section: Resultsmentioning

confidence: 99%

“…The phase curves of the TIR transducers are smoother than those of the SPR measurements. The sensitivity is lower than the SPR, but with a wider range of scanning angles [4].…”

Section: Introductionmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

Twu

Wang

2016

Applied Sciences

View full text Add to dashboard Cite

show abstract

“…Over the past few decades, there are many articles [1][2][3][4][5][6] for measuring small angles have been proposed. Chiu and Su proposed some improved techniques [3][4] for measuring small angles some years ago.…”

Section: Introductionmentioning

confidence: 99%

New type small-angle sensor based on the surface plasmon resonance technology

Wang

Lin

Hsu

et al. 2009

2009 IEEE Intrumentation and Measurement Technology Conference

Self Cite

View full text Add to dashboard Cite

In this paper, a new type small-angle sensor based on the surface plasmon resonance (SPR) technology is proposed. Two right angle prisms are mounted on two high precision rotation stages, respectively. When the light source passes through this experimental structure, we can achieve the small rotation angle only by measuring the output powers by uses of two photo-detectors. The resolution of the system can reach 1.2×10 -6 radian.

show abstract