2017
DOI: 10.1088/1361-6528/aa824f
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Influence of swift heavy ion irradiation on the photoluminescence of Si-nanoparticles and defects in SiO2

Abstract: The influence of swift heavy ion (SHI) irradiation on the photoluminescence (PL) of silicon nanoparticles (SiNPs) and defects in SiO-film is investigated. SiNPs were formed by implantation of 70 keV Si and subsequent thermal annealing to produce optically active SiNPs and to remove implantation-induced defects. Seven different ion species with energy between 3-36 MeV and fluence from 10-10 cm were employed for irradiation of the implanted samples prior to the thermal annealing. Induced changes in defect and Si… Show more

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Cited by 7 publications
(2 citation statements)
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“…Most of the energetic Xe 18+ ions stopped at a depth range of 8-10 μm, resulting in the increase of nuclear stopping power S n due to elastic collision. It is well known that the electronic stopping power S e plays a main role in SHII process [31], which is in agreement with the calculated S n and S e in figure 1(c). Besides, the DPA distribution meets the color changes in the optical microscopy image of figure 1(a), which demonstrates the refractive index variation and lattice damage during SHII.…”
Section: Resultssupporting
confidence: 90%
“…Most of the energetic Xe 18+ ions stopped at a depth range of 8-10 μm, resulting in the increase of nuclear stopping power S n due to elastic collision. It is well known that the electronic stopping power S e plays a main role in SHII process [31], which is in agreement with the calculated S n and S e in figure 1(c). Besides, the DPA distribution meets the color changes in the optical microscopy image of figure 1(a), which demonstrates the refractive index variation and lattice damage during SHII.…”
Section: Resultssupporting
confidence: 90%
“…When operation of the present pelletron accelerator began in 2001, the MeV-ion irradiation beamline described in [42] was transferred to the facility. Since then it has been employed for various irradiation experiments investigating, for example, defects, vacancies and ion tracks in Si, SiO 2 and SiC [43][44][45], and the effect of heavy ion irradiation on the photoluminescence of Si nanoparticles [46,47]. During irradiation experiments the ion beam delivered by the tandem accelerator is scanned homogenously over an area up to 10 × 10 cm 2 on the target, and ion fluences up to a few times 10 16 cm −2 are readily achievable within hours of exposure time, depending on the selected projectile species.…”
Section: Irradiation Beamlinementioning
confidence: 99%