2011
DOI: 10.1016/j.diamond.2011.01.005
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Influence of oxygen plasma treatment on properties of Methyl-BCN film

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Cited by 2 publications
(2 citation statements)
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“…With the application of a plasma-assisted CVD approach, it is possible to prepare a methyl BCN film at a temperature of 350 °C. By the introduction of N 2 and TMAB as the source gases to the chamber for deposition, a methyl BCN film having a thickness of about 200 nm was deposited over a p-type single crystal wafer having (100) orientation . It is also possible to synthesize BCN nanosheets from natural resources, such as coconut shells, using a thermal decomposition approach.…”
Section: Synthesis Methods Of Boron Carbon Nitridementioning
confidence: 99%
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“…With the application of a plasma-assisted CVD approach, it is possible to prepare a methyl BCN film at a temperature of 350 °C. By the introduction of N 2 and TMAB as the source gases to the chamber for deposition, a methyl BCN film having a thickness of about 200 nm was deposited over a p-type single crystal wafer having (100) orientation . It is also possible to synthesize BCN nanosheets from natural resources, such as coconut shells, using a thermal decomposition approach.…”
Section: Synthesis Methods Of Boron Carbon Nitridementioning
confidence: 99%
“…By the introduction of N 2 and TMAB as the source gases to the chamber for deposition, a methyl BCN film having a thickness of about 200 nm was deposited over a p-type single crystal wafer having (100) orientation. 40 It is also possible to synthesize BCN nanosheets from natural resources, such as coconut shells, using a thermal decomposition approach. In this procedure, H 3 BO 3 and CO(NH 2 ) 2 were uniformly dispersed in deionized water and mixed at 70 °C for 0.5 h. Then, coconut charcoal in powder form was transferred into the above mixture with stirring until a homogeneous dispersion was formed, and this resultant powder was dried and further kept for ball milling.…”
Section: Synthesis Of Boron Carbonmentioning
confidence: 99%