Abstract:Ti-Al-Mo-N composite films with different molybdenum content were deposited by reactive magnetron sputtering. The results showed that the films consisted of fcc-(Ti, Al, Mo) N substitutional solid solution within 8.2 at.-% Mo. The films consisted of two phases which were fcc-(Ti, Al, Mo) N substitutional solid solution and fcc-Mo 2 N at 27.7-49.4 at.-% Mo. The hardness increased slowly at 0-27.7 at.-% Mo and then increased rapidly at above 27.7 at.-% Mo. A ball-on-disc dry sliding test was conducted on films d… Show more
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