Influence of annealing above the deposition temperature on metastability in amorphous silicon

Thermal equilibrium, the Staebler-Wronski effect and potential fluctuations in lithium-doped hydrogenated amorphous silicon

“…We have previously reported that the LS increases the potential uctuations in these ® lms, whereas FQ has hardly any e ect on them. Several recent reports suggest that these metastabilities are related to the microstructure present in a-Si : H ® lms (Xu et al 1993, Irrera 1994, Vanecek et al 1996, Zellama et al 1996, Zhang et al 1996, Tsu et al 1997. The microstructure depends sensitively upon the deposition conditions (Xu et al 1996, Tsu et al 1997Bauer et al 1998).…”