In situ measurement of the thermal expansion behavior of benzocyclobutene films

Abstract

In situ measurement techniques suitable for determination of the coefficient of thermal expansion (CTE) in thin, spin‐cast polymer films in both the in‐plane and through‐plane directions are presented. An examination of the thermal expansion behavior of cyclotene thin films has been performed. In particular, the effect of film thickness on the in‐plane and through‐plane CTE and in‐plane Young's modulus of spin‐coated cyclotene films was examined. It is shown that the mechanical response of in situ cyclotene films can be adequately described by isotropic film properties. It was also demonstrated that there is no thickness dependence on the free‐standing mechanical properties or on the resulting through‐plane thermal strain in an in situ film. © 1999 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 37: 311–321, 1999

Directly patternable benzocyclobutene and methacrylate silsesquioxanes for microelectronics packaging

“…The Dow product, Cyclotene is a hybrid organicinorganic dielectric material that has been reported to have a dielectric constant of 2.65, a CTE ranging from 42 to 55 ppm/K 14) and there are some reports of direct patternability of Cyclotene down to 10¯m half pitch. 15),16) While these specifications do not quite meet the requirements for today's modern packaging standards, Cyclotene is an excellent example of the utility of BCB based thermosets.…”

Prism coupling technique investigation of elasto-optical properties of thin polymer films

“…This is due to the difficulty of measuring small thickness changes of thin films in the out-of-plane direction. 7 The refractive index measurements of thin films ͑t Ͻ 10 m͒ are usually done by making use of ellipsometry or prism coupling methods; the latter is preferred due to the higher accuracy and capability to measure birefringence. For the out-ofplane mechanical properties, on the other hand, there are several methods that have been reported recently.…”

Thermal Characterization of PMMA Thin Films Using Modulated Differential Scanning Calorimetry

“…Some techniques used to examine bound-polymer behavior are sensitive to segmental dynamics (or molecular motion) in the film such as electron spin resonance (ESR), 1,2,17,18 nuclear magnetic resonance (NMR), 3,4 and dielectric measurements. 9 Other techniques are used to relate the local structure or thickness changes in the polymer layer, such as positron lifetime spectroscopy, 5,6 spectroscopic ellipsometry, 7,8 X-ray, 10,11 and neutron 12,13 reflectometry. Even though various studies have attempted to characterize polymer thin films, the effects resulting from the interactions between the polymer and the substrate are still not sufficiently understood.…”

“…The number of studies of thin polymer films has increased in recent years, − and their findings have taken on more significance as technological devices incorporate the use of thin polymer-containing films. An understanding of the interaction between the polymer and substrate is especially needed as the thicknesses of the films approach molecular dimensions.…”

“…Some techniques used to examine bound-polymer behavior are sensitive to segmental dynamics (or molecular motion) in the film such as electron spin resonance (ESR), ,,, nuclear magnetic resonance (NMR), , and dielectric measurements . Other techniques are used to relate the local structure or thickness changes in the polymer layer, such as positron lifetime spectroscopy, , spectroscopic ellipsometry, , X-ray, , and neutron 12,13 reflectometry.…”