In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor : 2nd Report, Sensor Fabrication Based on MEMS Technology(Mechanical Systems)

Bandoh, Kenichi; Iwabuchi, Osamu; Yokota, Shinichi

doi:10.1299/kikaic.75.2942

Trans.JSME(C)

2009

DOI: 10.1299/kikaic.75.2942

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In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor : 2nd Report, Sensor Fabrication Based on MEMS Technology(Mechanical Systems)

Kenichi Bandoh

Osamu Iwabuchi²,

Shinichi Yokota³

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In-Situ Measurement and Control of Wafer Temperature Using Micro Sensor : 2nd Report, Sensor Fabrication Based on MEMS Technology(Mechanical Systems)

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