2018
DOI: 10.1038/s41566-018-0133-4
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In situ 3D nanoprinting of free-form coupling elements for hybrid photonic integration

Abstract: Hybrid photonic integration exploits complementary strengths of different material platforms, thereby offering superior performance and design flexibility in comparison to monolithic approaches. This applies in particular to multi-chip concepts, where components can be individually optimized and tested on separate dies before integration into more complex systems. The assembly of such systems, however, still represents a major challenge, requiring complex and expensive processes for high-precision alignment as… Show more

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Cited by 320 publications
(213 citation statements)
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References 39 publications
(32 reference statements)
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“…Moreover, the 2PP technique is well suited to small‐scale substrates, which is beneficial when applied to optical fiber end‐facets 23. Thus, fabrication of sophisticated structures on optical fiber tips has been successfully demonstrated using 2PP, with examples including micro‐optics,24–27 a miniature acoustic sensor,28 a microscale force sensor,29 and a force‐sensitive micro‐grasping tool 30. In the field of SERS, 2PP has been utilized to build polymeric templates, supports, or masks for lift‐off processes of metal layers, but these were mainly based on wafer‐scale substrates 31–36.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the 2PP technique is well suited to small‐scale substrates, which is beneficial when applied to optical fiber end‐facets 23. Thus, fabrication of sophisticated structures on optical fiber tips has been successfully demonstrated using 2PP, with examples including micro‐optics,24–27 a miniature acoustic sensor,28 a microscale force sensor,29 and a force‐sensitive micro‐grasping tool 30. In the field of SERS, 2PP has been utilized to build polymeric templates, supports, or masks for lift‐off processes of metal layers, but these were mainly based on wafer‐scale substrates 31–36.…”
Section: Introductionmentioning
confidence: 99%
“…This property differentiates TPP from the traditional photolithography and results in ultrafine 3D micro-and nano-structures. To date, TPP-based direct laser writing (DLW) has given rise to an abundance of researches on fabrication of optical components, photonic and acoustic structures, and biocompatible materials and structures [49][50][51][52].…”
Section: Introductionmentioning
confidence: 99%
“…The 1-dB lateral alignment tolerance amounts to  2.3 µm. The excess loss of 1.6 dB is attributed to the loss of the TIR reflection mirror, to Fresnel reflections at the lens surface and to fabrication imperfections, with significant potential for further improvement 7 . For estimation of the coupling efficiency to the TriPleX chip, we use a loop-back waveguide with 250 µm spacing between the input and output facet and measure the fiber-to-fiber loss between to be 6.2 dB, see Fig.…”
Section: Demonstratorsmentioning
confidence: 99%