volume 2, issue 5, P2000180 2021
DOI: 10.1002/adpr.202000180
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Kazi M. Islam, Ron Synowicki, Timothy Ismael, Isaac Oguntoye, Nathan Grinalds, Matthew D. Escarra

Abstract: Monolayer, few‐layer, and thin‐film MoS2 is synthesized using chemical vapor deposition (CVD) and thermal vapor sulfurization (TVS) methods. The complex refractive index of these samples is assessed using variable angle spectroscopic ellipsometry (VASE) measurements over a broad spectral range between 190 and 1700 nm. The ellipsometry data are sensitive to birefringence effects in the thickest thin‐film sample. These birefringence effects are investigated, and an analysis method is developed to extract the in‐…

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