volume 136, issue 2-3, P203-206 2007
DOI: 10.1016/j.mseb.2006.09.024
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Abstract: PZT films with (1 0 0) and (1 1 0) orientation were prepared by spin coating using the chemical solution deposition (CSD) method on an SRO/Si or a Pt/Ti/SiO 2 /Si substrate. The remnant polarization and the saturation polarization of the PZT/SRO/Si film were 21 and 35 C/cm 2 , and those of the PZT/Pt/Ti/SiO 2 /Si film were 20 and 31 C/cm 2 . The remnant polarization of the PZT/SRO/Si film maintained more than 10 8 switching cycles, and the fatigue property was observed for the PZT film fabricated on the Pt/Ti…

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