2002
DOI: 10.1007/bf02710540
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Improved zinc oxide film for gas sensor applications

Abstract: Zinc oxide (ZnO) is a versatile material for different commercial applications such as transparent electrodes, piezoelectric devices, varistors, SAW devices etc because of its high piezoelectric coupling, greater stability of its hexagonal phase and its pyroelectric property. In fact, ZnO is a potential material for gas sensor applications. Good quality ZnO films were deposited on glass and quartz substrates by a novel CVD technique using zinc acetate as the starting solution. X-ray diffraction confirmed the c… Show more

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Cited by 199 publications
(84 citation statements)
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“…The piezoelectric ceramic material, ZnO, is extensively used due to its unique combination of electrical, optical, and piezoelectric properties. These applications include the following: liquid crystal displays and window coatings 9 , gas sensors covering various materials [10][11][12][13] , optoelectronic devices 14 , solar cells 15 , surface acoustic wave devices (SAW) 16 , and ultrasonic transducers 17 .…”
Section: Introductionmentioning
confidence: 99%
“…The piezoelectric ceramic material, ZnO, is extensively used due to its unique combination of electrical, optical, and piezoelectric properties. These applications include the following: liquid crystal displays and window coatings 9 , gas sensors covering various materials [10][11][12][13] , optoelectronic devices 14 , solar cells 15 , surface acoustic wave devices (SAW) 16 , and ultrasonic transducers 17 .…”
Section: Introductionmentioning
confidence: 99%
“…For metal oxides, one challenge is the low sensitivity at room temperature. They require higher operating temperatures and thus heating element has to be incorporated with the sensor (Roy & Basu, 2002) This increases the power consumption, which is not very appealing for handheld applications. Good selectivity is another challenge for metal oxide conductivity sensors.…”
Section: Conductivity Sensors For Chemical Detectionmentioning
confidence: 99%
“…A wide range of gas sensors are developed using MOS (metal oxide semiconductors) because of their advantageous features like sensitivity to the air ambient conditions, low material cost, easy processing and simplicity in fabrication. The most commonly used MOS ZnO [1,2], SnO 2 [3], Fe 2 O 3 [4], In 2 O 3 [5], CeO 2 [6] in gas sensors are based on their change in electrical conductivity when they are exposed to test gases. At elevated temperatures (100-600 o C), these materials show large variations of electrical conductivity in response to the presence of traces of reactive gases in air.…”
Section: Introductionmentioning
confidence: 99%