Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminum

Peng, C.-Y.; Liu, C. Y.; Liu, N. W.; Wang, H. H.; Datta, Anindya; Wang, Y. L.

doi:10.1116/1.1884123

Cited by 22 publications

(14 citation statements)

References 14 publications

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“…In contrast, prepatterned-guided anodizations based on the pre-texturing of electropolished aluminum prior to anodizing are used for the synthesis of ideally ordered nanopores. Among these methods, a direct indentation of the aluminum surface with a tip of the scanning probe microscope [410,411], focused-ion beam lithography [412][413][414][415], holographic lithography [416] and resist-assisted focused-ion beam lithography [417][418][419] were used successfully to form the pattern on the aluminum surface. In the direct patterning of aluminum, each sample can be indented individually, although this makes the techniques time-consuming and also limits their applications to the laboratory scale.…”

Section: Self-organized and Prepatterned-guided Growth Of Highly Ordementioning

confidence: 99%

Highly Ordered Anodic Porous Alumina Formation by Self‐Organized Anodizing

Sulka

2008

Nanostructured Materials in Electrochemistry

236

298

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Section: Self-organized and Prepatterned-guided Growth Of Highly Ordementioning

confidence: 99%

Highly Ordered Anodic Porous Alumina Formation by Self‐Organized Anodizing

Sulka

2008

Nanostructured Materials in Electrochemistry

236

298

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“…All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA).…”

mentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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“…To obtain highly ordered monodomain alumina with uniform nanopores, two major approaches based on the aluminum pretexturation have been developed. After electropolishing, aluminum can be nanoidented with techniques such as fast ion bombardment [145,146,150,202], atomic force microscopy [97], or scanning probe microscopy [167] (Fig. 5).…”

Section: Formation Of Anodic Aluminum Oxidementioning

confidence: 99%

Nanoporous Anodic Aluminum Oxide: Fabrication, Characterization, and Applications

Stępniowski

Bojar

2015

Handbook of Nanoelectrochemistry

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Anodic aluminum oxide (AAO) consists of parallel pores arranged in a honeycomb-like array. Since a two-step self-organized approach in anodic alumina fabrication was invented, tremendous attention was paid to this material. Structural features of anodic alumina, like pore diameter, interpore distance, and nanoporous oxide thickness, can be fully controlled by operating conditions, including type, concentration and temperature of the electrolyte, applied voltage, and duration of the anodization process. Moreover, these operating conditions have also a major impact on the nanoporous array arrangement. Quantitative arrangement analysis methods employing fast Fourier transforms have been developed to assess the nanopores' arrangement. The most frequent application of the anodic aluminum oxide is a template-assisted fabrication of nanostructures. Templates made of the AAO are being successfully applied in fabrication of nanowires, nanotubes, and nanodots by using diversity of techniques, including electrochemical deposition, physical and chemical vapor deposition, sol-gel techniques, etc. Due to the size of obtained nanostructures, magnetic, electric, piezoelectric, luminescent, and catalytic properties of the deposited materials can be significantly improved. Thus, control of the nanopores' structural features and arrangement is crucial for AAO applications in nanotechnology.

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Ideally ordered 10 nm channel arrays grown by anodization of focused-ion-beam patterned aluminum

Cited by 22 publications

References 14 publications

Highly Ordered Anodic Porous Alumina Formation by Self‐Organized Anodizing

Highly Ordered Anodic Porous Alumina Formation by Self‐Organized Anodizing

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Nanoporous Anodic Aluminum Oxide: Fabrication, Characterization, and Applications

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