<i>IsGISAXS</i>: a program for grazing-incidence small-angle X-ray scattering analysis of supported islands

Lazzari, Rémi

doi:10.1107/s0021889802006088

Cited by 420 publications

(502 citation statements)

References 38 publications

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“…In order to quantify the structural changes along the µGISAXS scan we carried out modelling of the experimental diagrams by using the IsGISAXS software. 14 The distorted wave Born approximation (DWBA) was applied, considering an array of polymer boxes standing on the polymer film. The values of the refraction indexes (n = 1 -δ + iβ) for both box and polymer substrate were considered to be similar, δ = 3.3 × 10 −6 and β = 5.1 × 10 −9 .…”

Section: Modelling and Discussionmentioning

confidence: 99%

“…[10][11][12] In recent times, the introduction of microbeams for GISAXS characterization has improved the spatial resolution of the technique. 13 Moreover, modelling of the experimental GISAXS diagrams has been accomplished using different software packages, 14,15 providing valuable information to interpret the experimental results. 16,17 Laser induced periodic surface structures (LIPSS) are generated by irradiation of solid surfaces by linearly polarized laser pulses of nanosecond (ns) to femtosecond (fs) duration.…”

Section: Introductionmentioning

confidence: 99%

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Mapping the Structural Order of Laser-Induced Periodic Surface Structures in Thin Polymer Films by Microfocus Beam Grazing Incidence Small-Angle X-ray Scattering

Martín-Fabiani

Rebollar²,

García-Gutiérrez³

et al. 2015

ACS Appl. Mater. Interfaces

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In this work we present an accurate mapping of the structural order of laser-induced periodic surface structures (LIPSS) in spin-coated thin polymer films, via a microfocus beam grazing incidence small-angle X-ray scattering (μGISAXS) scan, GISAXS modeling, and atomic force microscopy imaging all along the scanned area. This combined study has allowed the evaluation of the effects on LIPSS formation due to nonhomogeneous spatial distribution of the laser pulse energy, mapping with micrometric resolution the evolution of the period and degree of structural order of LIPSS across the laser beam diameter in a direction perpendicular to the polarization vector. The experiments presented go one step further toward controlling nanostructure formation in LIPSS through a deep understanding of the parameters that influence this process.

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Section: Modelling and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Mapping the Structural Order of Laser-Induced Periodic Surface Structures in Thin Polymer Films by Microfocus Beam Grazing Incidence Small-Angle X-ray Scattering

Martín-Fabiani

Rebollar²,

García-Gutiérrez³

et al. 2015

ACS Appl. Mater. Interfaces

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“…Figure 3 shows three selected μGISAXS data and the corresponding simulated scattering patterns using the IsGISAXS software. 55 The principal features of all scattering patterns are the pronounced intensity side maxima which are already present in the pure template. The intensity of these side maxima is noticeably changing with increasing amount of sputter deposited iron.…”

Section: Resultsmentioning

confidence: 99%

Selective Doping of Block Copolymer Nanodomains by Sputter Deposition of Iron

et al. 2011

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We investigate the formation of an ordered array of metal nanoclusters via selective doping of microphase-separated nanodomains in thin diblock copolymer films. Nanostructure formation during this doping process is probed in situ with microbeam grazing incidence smallangle X-ray scattering (μGISAXS) and ex-situ with atomic force microscopy (AFM). During sputter deposition of iron on the thin film template of polystyrene-block-poly(methyl methacrylate) P(S-b-MMA) copolymer, having upright cylindrical domains of PMMA, iron atoms selectively dope the PMMA domains due to the preferential chemical affinity. AFM confirms the μGISAXS results that the iron atoms preferentially wet the PMMA domains at low amount of sputter deposited iron. Up to a threshold of a nominal thickness of 2.0 nm deposited iron, the atoms wet only the PMMA domains and create the ordered array of metal nanoclusters. Above this threshold thickness the iron nanostructures grow laterally and finally cover the complete template surface.

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“…Table 1). (b, c) AFM topographic images (semi-contact mode, f ¼ 150 Hz) of the sample 2a (see Table 1 [25] ) scattering 2D-data (b). Outof-plane cuts (c) -a f ¼ 0.1878, as indicated by the white arrows in (a) -extracted from the experimental (data) and simulated (simu) GISAXS 2D-data and approximation (EIA [23] ) of the experimental curve.…”

Section: Discussionmentioning

confidence: 99%

“…Scattering from hexagonal close-packed PS particles on a Si substrate was simulated using the software IsGISAXS [25] . Computation of the scattered intensity was based on the distorted wave born approximation (DWBA [26] ).…”

Section: Simulationmentioning

confidence: 99%

Stripe‐Like Pattern Formation in Airbrush‐Spray Deposition of Colloidal Polymer Film

et al. 2010

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Thin films and multilayer structures are used in a wide range of applications. To name just a few: sensor coating, [1][2][3] microelectronics, [4] solar cell technology, [5,6] and magnetic recording. [7] In the last few years, organic-based hybrid devices received strong attention from both academy and industry because of their potential for low-cost production and flexible device applications. [5] In order to improve the device performances, new approaches are needed to install thin films showing lateral order and high uniformity over large areas. Many methods have already been developed: bottom-up approaches such as solution casting, [8] spincoating, [5] inkjet printing, [9,10] dip-coating, [11] and also topdown approaches such as lithography [12,13] or vacuum deposition. [14] Recently, the novel technique of airbrush-spray deposition was used in the fabrication of organic-based multilayer devices such as diodes, [15] transistors, [16] semiconductors, [17] electrolyte films, [18,19] and solar cells. [20][21][22] The airbrush-spray coating technique allows performing fast and economic deposition of organic-based layers showing high structural uniformity over large areas and is thus of great interest in industrial applications. ExperimentalFor the polymer coating, we used a commercial airbrush-spray (Harder & Steenbeck, Evolution Silverline) with a needle diameter of 30 mm (see Fig. 1). Two different types of aqueous colloidal suspensions (provided by Kisker GbR, Steinfurt, Germany) were deposited: polystyrene (PS) colloids (initial concentration: 2.5 wt%) and carboxylated polystyrene (cPS) colloids (initial concentration: 5.0 wt%). Both types of colloids have a nominal diameter of 96 nm. Two different solvents were used for further dilution, namely deionized water and ethanol. Influence of the solvent on the film lateral ordering will be discussed later. Spray coatings were performed on flat Silicon (Si) substrates (18 Â 30 mm 2 ) at an air pressure P ¼ 3 bar in a horizontal configuration. Prior to use, the Si wafers were cleaned in a basic bath (35 mL of 25% ammoniac, 25 mL of 35% hydrogen peroxide, and 350 mL of deionized water) at a temperature of 75 8C. The cleaned substrates were further individually rinsed in deionized water and dried using nitrogen flow.Two different spray-deposition modes were examined. In the first mode, the coating is performed in one single cycle at a short spray nozzle-to-substrate distance (D SS ¼ 73 mm). In the second mode, the coating consists in three spray cycles at a larger spray nozzle-to-substrate distance (D SS ¼ 142 mm). These two distances ensure a complete coating of the substrate. By enlarging the distance, one can reduce the amount of solvent (by evaporation) impinging on the substrate. A spray cycle is 1 s, the time between two successive spray cycles (second coating mode) 5 s. The total coating time is 1 s in the first mode and 3 s in the second mode. An overview of the parameter sets used in this study is given in We use the versatile technique of Grazing incidence ...

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IsGISAXS: a program for grazing-incidence small-angle X-ray scattering analysis of supported islands

Cited by 420 publications

References 38 publications

Mapping the Structural Order of Laser-Induced Periodic Surface Structures in Thin Polymer Films by Microfocus Beam Grazing Incidence Small-Angle X-ray Scattering

Mapping the Structural Order of Laser-Induced Periodic Surface Structures in Thin Polymer Films by Microfocus Beam Grazing Incidence Small-Angle X-ray Scattering

Selective Doping of Block Copolymer Nanodomains by Sputter Deposition of Iron

Stripe‐Like Pattern Formation in Airbrush‐Spray Deposition of Colloidal Polymer Film

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